MultiPak Version 9

Data Reduction Software for AES and XPS

PHI MultiPak has been long regarded as the most comprehensive data reduction and data interpretation software package in the industry.  It includes an array of powerful, easy-to-use software tools that include spectral peak identification, chemical state information, quantification, detection limit enhancement, and peak fitting for XPS and AES.

 The newly released MultiPak V9 has been enhanced by the addition of:

  XPS spectral deconvolution for high speed/low exposure work (Figure 1)

 

 
(Figure 1: New feature in MultiPak: Pass Energy Deconvolution)
 

  polynomial background subtraction

  principle component analysis smoothing for XPS maps

  a 'save massaged files' feature

 

MultiPak comes standard with:

  automatic peak identification

  XPS chemical state databases

  linear least squares fitting

  non-linear least squares fitting

  target factor analysis

  ADXPS stratification

  image scatter diagrams

  retrospective chemical imaging

  automated data reduction sequences

  batch mode processing

 

MultiPak Version 9 can be used on the instrument PC for real-time processing or on an off-line PCS for report generation and supports data file formats from:

  SmartSoft

  SUMMITT

  COMPASS

  PC-ACCESS

  PC-Explorer

 

(Figure 2: Color AES overlay: Si (green), SiOx (red), and W (blue) from a FIB cut of a defect)