PHI 700 Auger Nanoprobe

Application Notes

• Characterizing Electrically Isolated Bond Pad Surfaces
• Characterizing Nano-Scale Precipitates in Steel
• High Spatial Resolution Auger Imaging
• High Spatial Resolution Auger Imaging of Highly Topographic Samples
• Fracture Analysis of an Embrittled Low Alloy Steel Rotor Blade from an Operating Steam Turbine
• Auger Analysis of Boron Oxide Crystals Formed by CBN Chemical Vapor Deposition (CVD)
• Using Low Energy Ions for Charge Neutralization in Scanning Auger Nanoprobes
• Optimized Depth Resolution with Low Voltage Sputtering and Zalar Rotation
• TiN Composition Measurements by Auger Electron Spectroscopy
• Compucentric Zalar Profile of a 10 μm Al Pad Using the PHI 680 Scanning Auger Nanoprobe
• Defect Navigation on Wafer Pieces with the PHI 700 Auger Nanoprobe