PHI 700 Auger Nanoprobe
Overview
The PHI 700 Scanning Auger Nanoprobe is a state-of-the-art, high performance Auger
Electron Spectroscopy (AES)
surface analysis system that provides elemental and chemical state information of sample surfaces,
submicron features, thin films and interfaces.
The 700’s Schottky field emission optics provide Auger spatial resolution of less than
8 nm. The result is rapid, high resolution secondary electron and Auger imaging of submicron
features. The coaxial geometry of the 700’s electron column and the Cylindrical Mirror
Analyzer (CMA) enables rapid, accurate Auger analysis of all samples, including those with rough
surfaces or complex geometries, as analytical shadowing is eliminated.
High performance Auger spectral analysis, SEM/Auger imaging, and depth profiles combine to
provide complete characterization of complex samples such as:
- Semiconductor devices: surface defects or particles, imbedded defects, contamination, thin films and failure analysis
- Metals: coatings, composites, grain boundary analysis (including in situ fracture), corrosion and other failures
The 700 features a five-axis, fully-motorized specimen stage controlled with PHI’s
new SmartSoft user interface, which is now available with a
Die Navigation
module. The specimen stage and software combine to provide flexibility in sample handling
and the ability to automatically analyze multiple features or samples.
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