PHI
700 Auger Nanoprobe
Overview
The PHI
700 Scanning Auger Nanoprobe provides high performance Auger (AES) spectral analysis, Auger imaging, and sputter depth profiling of complex materials including: nanomaterials, catalysts, metals, and electronic devices.
The
700’s field emission electron source provides a high brightness electron beam with a diameter of less than 6 nm for secondary electron imaging. The coaxial geometry of the
700’s electron column and Cylindrical Mirror Analyzer (CMA) enables high Auger sensitivity over a broad range collection angles ensuring rapid and complete analysis routine flat samples as well as samples with complex shapes or high surface roughness.
A high performance sputter ion gun, motorized five axis sample stage, and high sensitivity analyzer provide a uniquely high performance thin film analysis (sputter depth profiling) capability. User selectable thin film analysis features including: multi-point thin film analysis, low voltage (100-500 V) sputtering, Compucentric Zalar Rotation™ and an array of advanced data reduction tools in PHI
MultiPak, allow a user to extract as much information as possible from a sputter depth profile data set.
For 40 years, PHI CMA based Auger instruments have been the first choice of surface analysts around the world. The PHI
700 provides a superior Auger instrument platform, proven reliability, and the performance.
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