Used Equipment

Factory Certified Used Instruments

These instruments have been fully refurbished at PHI and performance has been brought up to the original specifications.  All instruments are backed with the same 1-year warranty as a new instrument.  Prices include installation, warranty and training.  Once the warranty expires, a wide range of service contracts are also available to meet your requirements.  Below is a list of used instruments currently available:

• PHI 670 Scanning Auger NanoprobeSOLD
• PHI 690 Scanning Auger Nanoprobe
• PHI SMART-200
• PHI TRIFT III SystemSOLD
• Used Components

For further information regarding used instruments, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.  PHI continually receives updates regarding used equipment.  If you do not see what you need currently available on our website, please contact us at sales@phi.com.

Used PHI 670 Scanning Auger Nanoprobe

PHI 670 Scanning Auger Nanoprobe

This PHI 670 Scanning Auger Nanoprobe is based on PHI’s patented coaxial analyzer and field emission electron gun technology. This instrument was originally installed in 1993 and has received four of the six upgrades that differentiate a 670 from a 680 including:

1. Replaced Apollo Workstation with an NT based Personal Computer
2. Replaced manual specimen stage with the motorized 15-680 specimen stage
3. Replaced the turbo pump with a magnetic levitation turbo pump
4. Upgraded the electron gun deflection from quadrupole to octopole deflection

The ultimate spatial resolution of a 670 is guaranteed to be 15 nm or less. For further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.

Used PHI 690 Scanning Auger Nanoprobe

PHI 690 Scanning Auger Nanoprobe

This PHI 690 Scanning Auger Nanoprobe is based on PHI’s patented coaxial analyzer and field emission electron gun technology.  The ultimate spatial resolution of a 690 is guaranteed to be 11 nm or less. For further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.

Used SMART-200 Auger Defect Review Tool

PHI SMART-200 Auger Defect Review Tool

This SMART-200 Auger defect review tool is based on PHI’s patented coaxial analyzer and field emission electron gun technology. The sample handling apparatus can be used to manually introduce single 200 mm silicon wafers and navigate to defects. The ultimate spatial resolution of a SMART-200 is guaranteed to be 10 nm or less. For further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.  

Used PHI TRIFT III System

PHI TRIFT III System - (this system has been sold but check the website for additional TRIFT III systems, or contact sales@phi.com)

This PHI model TRIFT III Time-of-Flight Secondary Ion Mass Spectrometer System is based on PHI’s patented triple focusing TRIFT Time-of-Flight Secondary Ion Mass Spectrometer.  The instrument includes the following:

1. Au LMIG
2. 06-350 Ar Ion Gun
3. Cold Stage

For further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.

Used Components

Used Components Currently Available

These used components have been fully refurbished at PHI and performance has been brought up to the original specifications.  All used components are backed with a 6 month warranty.  Above is a list of used components currently available.  For further information regarding these components, please contact Irv Hosford, In-House Depot and Repair Manager, at 952-828-6243.