Refurbished Equipment
Factory Certified Refurbished Instruments
These instruments have been fully refurbished at PHI and performance has been brought up to the original specifications. All instruments are backed with the same 1-year warranty as a new instrument. Prices include installation, warranty and training. Once the warranty expires, a wide range of service contracts are also available to meet your requirements. Below is a list of refurbished instruments currently available. Please note: We will be adding some additional refurbished equipment to our inventory in the next few months.
For further information regarding refurbished instruments, please contact the PHI sales person in your area or Molly Jacobs in sales support at 952-828-6282. PHI continually receives updates regarding used equipment for refurbishing, such as 670, 680, AES, and 5000 series XPS Systems. If you do not see what you need currently available on our website, please contact us at sales@phi.com.
PHI SMART-II
The PHI SMART-II is designed to obtain definitive defect identification by Auger inspection. The tool is uniquely designed to perform comprehensive elemental characterization and secondary electron imaging inspection of particulate defects on blank, monitor and processed 200mm and 300mm wafers. Definitive elemental identification of defects is routinely accomplished with the system.
The tool includes as standard a Schottky thermal field emission primary electron column, a full co-axial cylindrical mirror Auger analyzer, a high performance low voltage Argon sputter ion gun, a color zoom video camera, a four axis laser interferometer controlled wafer stage allowing full coverage of a 300mm wafer and a manual wafer introduction system.
Express Interest: Contact the PHI sales person in your area or Call Molly Jacobs in sales support at 952-828-6282
18725 Lake Drive East, Chanhassen, MN 55317