When the features of interest are too small for XPS analysis, Auger Electron Spectroscopy (AES) is often used. The AES probe electron beam is up to 100 times smaller than the XPS X-ray beam, opening up new possibilities for sample characterization at increased spatial resolution.
With the PHI Genesis, the convergence of the optical, SXI, and SEM images allows for an intuitive approach to identifying regions of interest for analysis.
XPS and AES session tabs in the SmartSoft acquisition software are set up to operate seamlessly, allowing for in-situ analysis using both techniques at the same region of interest without moving the sample. Similar options for spectral analysis, depth profiling, line scans, and maps are available with both techniques.
Dual charge neutralization allows for AES analysis of insulating samples.