PHI Quantera XPS Microprobe
Overview
The Quantera, PHI's second generation Scanning X-ray Microprobe provides the sensitivity
and tools needed to apply XPS surface analysis to a broader range
of current and future product development and failure analysis needs. High performance micro-area
spectroscopy, XPS depth profiling, automated insulator analysis, and robotic sample handling define
a new generation of XPS surface analysis equipment for today's laboratory.
Important features of the Quantera SXM include:
- Patented scanning x-ray microprobe design with <9um diameter minimum x-ray beam size
- Complete XPS capabilities (spectroscopy, depth profiling, mapping, etc.) at all x-ray beam sizes
- Highest performance XPS instrument for thin film depth profiling
- Optional C60 sputter ion gun for organic / polymer depth profiling
- Automated effortless analysis of electrically insulating samples
- Accurate quantitative analysis
- Robotic sample handling
- A completely automated, easy to use instrument platform
Micro area spectroscopy and high performance thin film analysis capabilities open new areas of
application for XPS surface analysis in all environments. The complete automation of the system
makes it easy to use and increases the reproducibility of routine measurements. Large sample
platens make it possible to analyze “real world” large samples or multiple small samples
automatically. A new generation of XPS surface analysis instruments are available today from
PHI.
The Quantera’s unique scanning x-ray source provides superior micro-area spectroscopy performance and the features you would expect from a microprobe instrument including: secondary electron imaging, XPS imaging, point and multi-point analysis.
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