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Webinar Announcement: StrataPHI - New Software for Thin Film Structure Analysis using XPS and HAXPES

presented by Kateryna Artyushkova, Senior Staff Scientist at Physical Electronics

Thin-film structures are of increasing importance for advanced materials science and technologies, such as microelectronic devices, surfaces modified by physical and chemical methods, and coatings. The properties of these structures can be understood if the chemical composition at and near surfaces and interfaces is known. Angle-resolved or angle-dependent XPS (ADXPS) is a powerful, non-destructive method that provides a quantitative chemical composition depth profile for thin film structures with thicknesses within the XPS sampling depth, under 5-10nm for an Al K alpha soft X-ray source and ~15-30 nm for a Cr K alpha hard X-ray source

In this webinar, we will discuss the basic principles behind ADXPS and methods for extracting depth composition. We will introduce a new software product, StrataPHI, for estimating the structure of thin-film stacks from angle-dependent and spectral XPS data. We will demonstrate examples of thickness calculations by StrataPHI for ultrathin 2D materials and multi-layered thin-film structures. One of the unique features of StrataPHI will also be described, which is the calculation of discrete layer thicknesses from spectral data measured at a single take-off angle (TOA) for multi-layer samples with unique chemistry in each layer.

Register for the webinar here