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Multi-technique Demonstration Video - PHI 710 Scanning Auger Nanoprobe

In this brief demonstration, Auger electron spectroscopy (AES) is utilized in conjunction with Energy Dispersive X-ray Spectroscopy (EDS) and Focused Ion Beam (FIB) on the PHI 710 Multi-technique Scanning Auger Nanoprobe. The complementary nature of the techniques allows for a buried metal particle to be first located and quickly characterized with EDS and subsequently FIB milled then mapped in situ with high spatial resolution Auger imaging.

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© 2021 Physical Electronics, Inc. (PHI) All Rights Reserved.
© 2021 Physical Electronics, Inc. (PHI) All Rights Reserved.