Leading European Semi Conductor Research Center Takes Delivery of PHI Quantes

April 22, 2019 – Chanhassen, Minnesota - Physical Electronics (PHI), announces the sale and delivery of its Hard X-ray Photoelectron Spectroscopy (HAXPES) instrument, Quantes, for quantitative analysis of thin film structures and new gate geometries for next generation CMOS devices.

"The introduction of Quantes, a laboratory-based HAXPES instrument, will open new applications for non-destructive quantitative analysis of buried layers and interfaces that require a three times deeper analysis depth compared to what conventional lab-based XPS instruments can currently provide." notes Dr. Scott Bryan, President of Physical Electronics. “In a joint development program with imec, we are now starting to develop protocols for the new tool on a high-throughput platform.”

Until now, scientists were limited to synchrotron-based instruments for hard X-ray spectroscopic experiments, but Physical Electronics’ new Quantes HAXPES the instrument brings the power of hard X-rays into a laboratory making HAXPES widely accessible in academia and industry.  

“The PHI HAXPES instrument extends the capabilities of the already well-accepted materials characterization technique of XPS in providing elemental composition and speciation information from solid surfaces on a non-synchrotron-based platform” stated Paul van der Heide, Director of Materials and Component Analysis group at imec.

As data and research is conducted through this joint development program, updates will become available from the results.

About Physical Electronics:

Physical Electronics is a subsidiary of ULVAC-PHI, the world's leading supplier of UHV surface analysis instrumentation for research and development of advanced materials in a number of high technology fields. They provide unique tools to solve challenging problems and accelerate the development of new materials and products.

For more information, visit Connect with PHI on LinkedIn and YouTube.

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