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Introducing NEW PHI VersaProbe 4

Scanning XPS Microprobe

Improved spectroscopic performance

  • High sensitivity in small and large area analysis using micro-focused, scanning X-ray source

NEW Large area imaging and mapping

  • X-ray induced Secondary Electron Imaging (SXI) for large area navigation
  • Large area chemical mapping

~ 25 x 2.5 mm SXI mosaic for selecting analysis locations with 100% certainty
~ 5 x 2.5 mm C1s (red) and Al 2p (blue) chemical map overlayed

High performance depth profiling

  • Multiple ion gun options for a variety of organic, inorganic, and mixed materials
  • Advanced software for thin film structure analysis

Reliable automation and remote operation

  • Highly configurable queuing system for automated unattended analysis and maximum efficiency
  • Fully remote operation and advanced remote diagnostics

Environmentally friendly modern configuration

  • Efficient power consumption, faster pump-down and ergonomic design

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18725 Lake Drive East, Chanhassen, MN 55317
© 2021 Physical Electronics, Inc. (PHI) All Rights Reserved.
© 2021 Physical Electronics, Inc. (PHI) All Rights Reserved.