A PHI VersaProbe II XPS instrument equipped with an argon gas
cluster ion gun is capable of being setup to depth profile thin or
thick polymer films and in doing so maintain the expected chemistry
throughout the film. Shown below (Fig. 1 and Fig. 2) is an XPS depth profile of a 10 µm
thick multi-layer polymer film that confirms the presence of
polyethylene layers, nylon layers, and blended layers at the expected
compositions. Depth profiling is used to verify the construction of
thin film structures, detect contaminants in layers and at interfaces
and observe inter-diffusion of layers.