Auger Electron Spectroscopy

To discuss a project or to request a quote, please contact PHI at analysis@phi.com or call us at 518-650-1892 (8 AM-5 PM CST).

AES Surface Analysis

Achieve SEM-like ultra-high resolution elemental and chemical characterization with the PHI 710 Scanning Auger Nanoprobe which is a premier tool for nanometer-scale surface and thin film analysis. The PHI 710 enables precise identification of elemental composition – ideal for advanced materials research and failure analysis. delivering detailed insights critical for innovation in nanotechnology and materials science.

Learn more about the AES technique

Available AES Analytical Services

• Quantitative elemental spectroscopy and nanoscale surface imaging up to 10 nm below a material’s surface, which allows for probing film structures and buried interfaces
• Sub-10 nm spatial resolution for elemental mapping and SEM-like imaging—down to 8 nm for AES maps and 3 nm for secondary electron images
• Nanoscale alternative to SEM-EDS, offering superior surface sensitivity and compositional information
• Inert sample transfer for air-sensitive materials using a vacuum-compatible vessel
• Monoatomic argon (Ar⁺) sputter depth profiling for compositional analysis through layered structures
• Powered by the PHI 710 Multi-Technique Scanning Auger Nanoprobe, equipped for high-resolution imaging, depth profiling, and chemical state analysis

Example AES Output – Nanoscale Elemental Analysis of Particle

Instrument Used for AES Analytical Services

• Maximum sample size of 60 mm diameter and 20 mm thickness
• Maximum electron beam accelerating voltage of 25 kV
• Sample must be solid and compatible with ultra-high vacuum (no liquid)

PHI 710 Scanning Auger Nanoprobe

Working Principle of AES Technique​

Learn more about the AES technique​.