ADXPS and Single Spectrum Thickness Calculations
Angle-dependent XPS (ADXPS) is a non-destructive way to probe chemical compositions of thin-film structures at different sampling depths.
ADXPS has multiple advantages over destructive sputter depth profiling. It provides chemical information which can be compromised by ion beam-induced damage; it can be applied to ultra-thin films and ion-beam damage-sensitive materials.
One of the goals of angle-dependent measurement is thin film thickness measurement and depth profile reconstruction.
StrataPHI is a software product for estimating the structure of thin-film stacks from spectral and angle-dependent XPS and HAXPES data. StrataPHI calculates thickness for thin-film structures composed of discrete layers. For multi-layer samples with unique chemistry in each layer, the thickness can be calculated from a single spectral data set.
Updated features and improved functionalities include:
- Estimating the structure of thin film from HAXPES data with new Cr RSF database
- Choice of Inelastic Mean Free Path (IMFP)/Effective Attenuation Length (EAL) methods
- Smart Processing Record tracks model setup and saves optimized structure for future analysis and sharing among users
- Support of Auger transitions
- Support of Fractional Stoichiometry in layer definition
- Improved output for batch processing
- Improved Attenuation Length Database Editor Interface
- Attenuation Length (AL) Database Editor can be used to calculate AL using any of the IMFP/EAL methods for multiple X-ray sources
- New functionality for creation of ANG and PRO files from group of individual SPE files
Applications:
- Multi-layer thin film thickness and composition
- Adventitious carbon thickness
- Surface coverage (atoms/cm2)
- High-throughput metrology tool for thin-film structures
Figure 1 . Graphical User Interface
Figure 2. Thickness of thicker layers can be accurately obtained from angle-dependent HAXPES data. Cr X-ray source gives access to Hf 3d avoiding overlap between Hf 4f and N2s transitions. Accurate quantification for all layers is obtained by using experimental RSF quantification parameters.
For 90 days evaluation copy, please contact sales@phi.com