ADXPS and Single Spectrum Thickness Calculations
StrataPHI is a new software product for estimating the structure of thin-film stacks from spectral and angle-dependent XPS (ADXPS) data. StrataPHI calculates thickness for thin-film structures composed of discrete layers. For multi-layer samples with unique chemistry in each layer, the thickness can be calculated from a single spectral data set.
Applications:
- Multi-layer thin film thickness and composition
- Ultrathin 2-dimensional materials thickness and composition
- Adventitious carbon thickness
- Surface coverage (atoms/cm2)
- High-throughput metrology tool for thin-film structures
For 90 days evaluation copy, please contact sales@phi.com
Application notes
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© 2021 Physical Electronics, Inc. (PHI)
All Rights Reserved.
© 2021 Physical Electronics, Inc. (PHI)
All Rights Reserved.