ADXPS and Single Spectrum Thickness Calculations

StrataPHI is a new software product for estimating the structure of thin-film stacks from spectral and angle-dependent XPS (ADXPS) data. StrataPHI calculates thickness for thin-film structures composed of discrete layers. For multi-layer samples with unique chemistry in each layer, the thickness can be calculated from a single spectral data set.


  • Multi-layer thin film thickness and composition
  • Ultrathin 2-dimensional materials thickness  and composition
  • Adventitious carbon thickness
  • Surface coverage (atoms/cm2)
  • High-throughput metrology tool for thin-film structures

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© 2021 Physical Electronics, Inc. (PHI) All Rights Reserved.
© 2021 Physical Electronics, Inc. (PHI) All Rights Reserved.