New StrataPHI - Software for Thin Film Structure Analysis

StrataPHI is a new software product for estimating the structure of thin-film stacks from spectral and angle-dependent XPS data. StrataPHI calculates thickness for thin-film structures composed of discrete layers. For multi-layer samples with unique chemistry in each layer, the thickness can be calculated from spectral data measured at a single take-off angle (TOA).


  • Multi-layer thin film thickness and composition
  • Ultrathin 2-dimensional materials thickness  and composition
  • Adventitious carbon thickness
  • Surface Coverage (atoms/cm2)
  • High-throughput metrology tool for thin-film structures