Article

Surface Analysis Spotlight: StrataPHI: Automated Thin Film Modeling and High Throughput Metrology Tool for XPS

Educational Series

Angle-dependent XPS (ADXPS) is a powerful analytical tool for studying the composition and thicknesses of thin films layered materials. However, when you think of the ADXPS experiment, you don’t think of it as a high-throughput tool.

Physical Electronics software StrataPHI has a unique ability to accurately estimate structure from a single TOA spectral dataset. This, along with features designed for high throughput calculations, makes thickness determination from XPS and HAXPES data a highly efficient metrological tool.

In this spotlight series, we show some examples of thin-film structure modeling and discuss how our customers can measure thicknesses of thin films from XPS and HAXPES data in a precise and efficient way. 

StrataPHI: Automated Thin Film Modeling and High Throughput Metrology Tool for XPS