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PHI 700 Auger Nanoprobe
Overview
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Die Navigation Module
Related Techniques
AES
Application Notes
Characterizing Electrically Isolated Bond Pad Surfaces
Characterizing Nano-Scale Precipitates in Steel
High Spatial Resolution Auger Imaging
High Spatial Resolution Auger Imaging of Highly Topographic Samples
Fracture Analysis of an Embrittled Low Alloy Steel Rotor Blade from an Operating Steam Turbine
Auger Analysis of Boron Oxide Crystals Formed by CBN Chemical Vapor Deposition (CVD)
Using Low Energy Ions for Charge Neutralization in Scanning Auger Nanoprobes
Optimized Depth Resolution with Low Voltage Sputtering and Zalar Rotation
TiN Composition Measurements by Auger Electron Spectroscopy
Compucentric Zalar Profile of a 10 μm Al Pad Using the PHI 680 Scanning Auger Nanoprobe
Defect Navigation on Wafer Pieces with the PHI 700 Auger Nanoprobe
PHI Quantera XPS Microprobe
Overview
Product Brochure
Related Techniques
XPS
Application Notes
Identifying Organic Defects
Identifying Stains on Packaging Materials
Determining Solder Ball Surface Chemistry
Characterizing Bumped Wafers
Full Wafer Surface Composition Maps
Hard Disk Surface Composition Maps
Automated QC Analysis: Silicone Detection
PHI Model 06-C60 C60 Sputter Ion Gun Package
Cleaning Polymer Surfaces with the PHI 06-C60 Sputter Ion Gun
Mapping Motor Oil Additives on a Cam Shaft Lobe
Micro-XPS of Contamination on Read/Write Heads
Characterizing a Block Copolymer Surface
Thin Film Analysis of Polymer Additive Migration Using the PHI Model 06-C60 Sputter Ion Gun
Depth Profiling Organic Films with the PHI 06 C60 Sputter Ion Gun
PHI VersaProbe XPS Microprobe
Overview
Product Brochure
Related Techniques
XPS
Application Notes
Identifying Organic Defects
Identifying Stains on Packaging Materials
Determining Solder Ball Surface Chemistry
Characterizing Bumped Wafers
Full Wafer Surface Composition Maps
Hard Disk Surface Composition Maps
Automated QC Analysis: Silicone Detection
PHI Model 06-C60 C60 Sputter Ion Gun Package
Cleaning Polymer Surfaces with the PHI 06-C60 Sputter Ion Gun
Mapping Motor Oil Additives on a Cam Shaft Lobe
Micro-XPS of Contamination on Read/Write Heads
Characterizing a Block Copolymer Surface
Thin Film Analysis of Polymer Additive Migration Using the PHI Model 06-C60 Sputter Ion Gun
Molecular Imaging of Micron Scale Features
Depth Profiling Organic Films with the PHI 06-C60 Sputter Ion Gun
PHI nanoTOF TOF-SIMS
Overview
Product Brochure
Related Techniques
TOF-SIMS
Application Notes
3D Imaging of a CMOS Device
Accurate Determination of Elemental Contamination on Wafer Surfaces
Analysis of Alq3 OLED Materials
Monitoring Elemental Contaminants on Semiconductor Product Wafers
PHI WinCadence Compound Identification Tool
Radial Distribution of Copper Contamination on the Surface of a Polished Silicon Wafer
SIMS Enhancement of Molecular Ion Yields Using a Gold LMIG
Surface Metal Contmination on Patterned Wafers
Time of Flight Secondary Ion Mass Spectrometry
TOF SIMS Analysis of a Drug Pellet Cross Section
TOF SIMS Analysis of a Hard Disk
TOF SIMS Analysis of a Pesticide Treated Leaf
TOF SIMS Analysis of a Pole Tip Gap
TOF SIMS Analysis of PDMS
TOF SIMS Analysis of Polystyrene Oligomer Distributions
TOF SIMS Analysis of Semiconductor Device Vias
TOF SIMS Characterization of Multi-Layer Paint Coatings
TOF SIMS Detection of High Mass Oligomers
TOF SIMS High Mass Resolution
TOF SIMS Imaging of a Paint Cross Section
TOF SIMS Imaging of Insulating Organic Samples with High Top
TOF SIMS Imaging of Molybdenum Oxide Powders
TOF SIMS Imaging of Rough Surfaces
TOF-SIMS Analysis of the Glass Phase in AZS Materials
TOF-SIMS Molecular Imaging of a Micropatterned Biological Ligand
Molecular Imaging of Micron Scale Features
Large Area (Mosaic) C60+ Imaging by TOF-SIMS
Chemical Imaging at the Interface of a Bulk Elastomer Laminate
3D Imaging of a Pharmaceutical Coating Using TOF-SIMS
Adjustable Height Sample Holder
PHI ADEPT-1010 D-SIMS
Overview
Product Brochure
Related Techniques
D-SIMS
Application Notes
Detection Limits for Atmospheric Contaminants
ADEPT-1010: Long Term Measurement Stability
Used PHI Equipment
Overview
PHI 670 Scanning Auger Nanoprobe
PHI SMART-200
PHI 690 Scanning Auger Nanoprobe
PHI TRIFT III
Used Components
Techniques
AES
Related Products
PHI 700 Auger Nanoprobe™
XPS / ESCA
Related Products
PHI Quantera XPS Microprobe
PHI VersaProbe XPS Microprobe
TOF-SIMS
Related Products
PHI nanoTOF TOF-SIMS
D-SIMS
Related Products
PHI ADEPT-1010 D-SIMS
Applications
Semiconductor
Magnetic Media
Materials Research
Polymers
Thin Films and Coatings
Biomedical
Pharmaceutical
About Us
About PHI
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Auger Analysis of Stardust at Washington University
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University of Illinois Workshop: New Developments and Applications of TOF-SIMS, SAM, and XPS for Surface and Thin Film Analysis
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