Surface Analysis Factory Repair Services


service@phi.com
1-800-922-4744

Our factory repair technicians  have over 150 years of combined experience working on PHI systems, providing a level of service and knowledge second to none.  PHI offers two primary options for resolving system electronics or “optics” issues.  Optics consists of any equipment installed in the vacuum chamber, or used to pump the chamber.  Depending on your situation, PHI can repair or rebuild your equipment.  

Electronic repairs routinely include any hardware or firmware updates, calibration, and complete testing.  Optics work includes total cleaning, updates, alignments, out-gassing, and in vacuum testing to ensure operation within specifications.  

PHI houses a very large inventory of exchange and replacement electronics core boards and components.  We also have a good inventory of optics, specific electron and ion gun sources, x-ray sources, specimen stages, and Auger upper nipples.  All these items have been thoroughly rebuilt, updated, and tested.  This inventory of parts is available for immediate shipment should your situation demand urgent attention.

For further information or for assistance on how PHI can help with your system repair needs, contact us at:  1-800-922-4744, Monday thru Friday, 7:00 AM to 5:00 PM CST.  Or email us at service@phi.com.

Physical Electronics Loaner/Exchange/Repair Item List

Please note that this list is subject to change without notice.  Call to confirm loaner, exchange, or repair service for any of these items.

Part Name Part Number Model Number
PCB-PA HOST,PAHOST2 02-02926 02-02926
ASSY-PCB,PA HOST,CHIPPED 02-02926-20 02-02926
ASSY-STAGE,2 INCH STD 02-02958 02-02958
PCB,SERIAL COMMUNICATE,6811CPU 02-03014 02-03014
ASSY-PCB,SERIAL COM,CHIPPED 02-03014-20 02-03014
PCB-POWER SUPPLY CONTROL, DAC 02-03141 02-03141
ASSY-PCB,PS CNTRL,SEC DAC,CHIP 02-03141-20 02-03141
ASSY-MODULE,LV,Cs PRI COLUMN 02-03201 02-03201
ASSY-MODULE,HV,SECONDARY 02-03202 02-03202
ASSY-MODULE,LV,DC SUPPLY 02-03204 02-03204
PCB-RASTER SCAN,RAST2 02-03225 02-03225
ASSY-PCB,RASTER SCAN,W/CHIPS 02-03225-20 02-03225
ASSY-PCB,RASTER SCAN,CHIPPED 02-03225-21 02-03225
ASSY-MODULE,INSTR POWER SUPPLY 02-03274 02-03274
(OBS)PCB, HIGH MASS PULSE OUT 02-03353 02-03353
(OBS)PCB ASSY,HIMASS PULSE OUT 02-03353-20 02-03353
PCB-FIFO CONTROL 02-03375 02-03375
(OBS-R/W 02-03375-21)PCB ASSY, 02-03375-20 02-03375
ASSY-PCB,FIFO CNTRL,TDC,CHIPPE 02-03375-21 02-03375
BD. CAMAC SERIAL 02-03414 02-03414
PCB, BUS CONVERTER, PA, PABC1 02-03415 02-03415
ASSY-PCB,BUS CONVERT,PA,CHIPPE 02-03415-20 02-03415
ASSY-POSITION MANIPULATOR, MK1 02-03442 02-03442
PCB, ANALOG MUX 02-03484 02-03484
ASSY-PCB,ANALOG MUX,CHIPPED 02-03484-20 02-03484
SEM BOX ASSY 02-03507 02-03507
ASSY-MODULE,POWER DISTRIBUTION 02-03629 02-03629
ASSY-MODULE,VACUUM LOGIC 02-03634 02-03634
ASSY-VACUUM CONTROL BOX 02-03680 02-03680
PCB-SEQUENCER 02-03832 02-03832
ASSY-PCB,SEQUENCER,CHIPPED 02-03832-20 02-03832
ASSY-PCB,SEQ,W/CHIPS,TRIFT II 02-03832-21 02-03832
ASSY-TDC PRE-AMP BOX 02-03866 02-03866
ASSY-E SOURCE,NEW,TFS 02-04281 02-04281
(BHN ECO)BOX ASSY,HIMASS PULSE 02-04428 02-04428
ASSY-MODULE,STEPPER MOTOR CTRL 02-04492 02-04492
ASSY-MODULE,PS,DET OPT #1 02-04556 02-04556
ASSY-MODULE,PS,DET OPT #3 02-04558 02-04558
(OBS-R/W 02-05089)MODULE,DETEC 02-04559 02-04559
(OBS-R/W 02-05090)MODULE,DETEC 02-04561 02-04561
ASSY-MODULE,LMG BUNCHER POWER 02-04572 02-04572
RAE PRE-AMP 02-04573 02-04573
WLDMT-BELLOWS,SAMPLE STAGE 02-04586 02-04586
DET POWER SUPPLY 02-04588 02-04588
ASSY-PULSER BOX,BUNCHER,LMG 02-04599 02-04599
ASSY-PULSER BOX,BUNCHER,Cs PRI 02-04600 02-04600
ASSY-PULSER BOX,BLANKER,Cs PRI 02-04601 02-04601
ASSY-COLD STAGE,TFS SAMPLE 02-04914 02-04914
PCB-GATE GENERATOR,SERIAL I/O 02-05033 02-05033
ASSY-PCB,GATE GEN,SER I/O,CHIP 02-05033-20 02-05033
ASSY-PCB,GATE GEN,SER I/O,CHIP 02-05033-21 02-05033
ASSY-PCB,SERIAL I/O,6650 02-05033-22 02-05033
ASSY-MODULE,PS,DET OPT #4 02-05089 02-05089
ASSY-MODULE,PS,DET OPT #6 02-05090 02-05090
ASSY-NITROGEN SPLY,SMPL STAGE 02-05167 02-05167
SEM PRE-AMP BOX 02-05307 02-05307
PCB-CONSTANT FRACTION 02-05417 02-05417
ASSY-PCB,CONSTANT FRACT,CHIPPE 02-05417-20 02-05417
ASSY-MODULE,CONSTANT FRACTION 02-05549 02-05549
FLG ASSY-BELLOWS,8" STAGE 02-05660 02-05660
ASSY-BOX,HIMASS 02-05702 02-05702
ASSY-MODULE,8" STEPPER MOTOR 02-05704 02-05704
PCB-VIDEO GENERATOR 02-05734 02-05734
ASSY-PCB,VIDEO GEN,W/CHIPS 02-05734-20 02-05734
ASSY-PCB,VIDEO GEN,DSIMS 02-05734-21 02-05734
ASSY-PCB,VIDEO GEN,DSIMS/FIB 02-05734-22 02-05734
MOD 04-090 NEUTR,(5000 SERIES) 615734 04-090
MOD 04-161-ION SOURCE 2KV,7 IN. A79163 04-161
MOD 04-162-ION SOURCE 2KV,9.25 IN 601884 04-162
MOD 04-173 LINEAR MOTION. 617790 04-173
SPUTTER SOURCE (5KV) A79166 04-191
ION SOURCE (4KV) 608552 04-300
ION SOURCE (DIFFY SOURCE) 613203 04-303
ION SOURCE (DIFFY SOURCE) A79171 04-303
MOD 04-303A DIFF PUMP ION SOURCE 619575 04-303A
X-RAY SOURCE (15KV) 602617 04-500
MOD 04-548 DUAL ANODE X-RAY SO 604016 04-548
MOD 04-725-SPECIMEN INTRO ATCH 607666 04-725
MOD 04-727 INTRO ATTACHMENT 618734 04-727
MOD 06-110-SCANNING ELECT. SOURCE 610226 06-110
MOD 06-350 ION SOURCE,5KV,680 631019 06-350
MOD 06-350 ION SOURCE,5KV,680 645296 06-350
MOD 06-350E ION SOURCE,5KV,SMART 639154 06-350E
MOD 06-350E ION SOURCE,5KV,SMART 645295 06-350E
MOD 06-350E ION SOURCE,5KV,SMART 648735 06-350E
MOD 06-350E ION SOURCE,5000 706982 06-350E
MOD 06-360 ION SOURCE,5KV,TRIFT 648213 06-360
MOD 06-650 MICROBEAM ION SOURCE 610517 06-650
MOD 06-650B MICROBEAM ION SOURCE 629180 06-650B
MOD 06-650PS PULSED SM BM ISOURCE 629181 06-650P
MOD 06-655 PULSED SM AREA MBIG 629691 06-655
MOD 06-655DS DUAL SCE MBIG 640993 06-655DS
MOD 06-656 PULSED SM AREA MBIG 635638 06-656 & 06-665
MOD 06-660A DUO SCE (END GAS) 610057 06-660
MOD 06-660A DUO SCE (CNTR GAS) 624877 06-660
MOD 06-660H DUO SCE (CNTR GAS) 636885 06-660
MOD 06-670-C/ion SOURCE 612545 06-670
MOD 06-670S SM BM C/ion SCE 628552 06-670S
MOD 06-670S SM BM C/ion SCE 629696 06-670S
MOD 06-900 C60 ION SOURCE, 10KV 701302 06-900 C60 SOURCE
MOD 07-763 INTRO ASSEMBLY 620036 07-763
MOD 10-110 ELECTRON SOURCE 618073 10-110
ANALYZER (TFA) 615255 10-155
ANALYZER (TFA) A79175 10-155
MOD 10-155A,CYL ANALY 6" FLG 625135 10-155A
MOD 10-210-ELECTRON SOURCE 614736 10-210
STAGE (SPECIMAN) 608292 10-310
STAGE (SPECIMAN) 610896 10-320
STAGE SPECIMAN 10-322 10-322
STAGE (SPECIMAN) 618312 10-323
MOD 10-325 SPECIMEN STAGE 619636 10-325
MOD 10-360-PRCN ENGY ANALY,SCA 608146 10-360
MOD 10-420 TOROIDAL MONOCHROM 622960 10-420
MOD 10-610/10-420 MONOCHR ASSY 623600 10-610
MOD 10-610 DUAL FNCT X-RAY SCE 628033 10-610
MOD 11-010 5KV ELECTRON SOURCE CO 179132 11-010
LEED CONTROL 179133 11-020
SOURCE CONTROL (10KV ELECTRON) 179134 11-045
SOURCE CONTROL (10KV ELECTRON) 603465 11-045A
AES/ESCA SYSTEM CONTROL 179135 11-055
ION SOURCE CONTROL, 11-065 179136 11-065
ION SOURCE CONTROL, 11-065 612368 11-065
MOD 11-065 DIFFY SOURCE CONTROL 623960 11-065
ION SOURCE CONTROL, 11-065 179136A 11-065 P REF
ION SOURCE CONTROL, 11-065 612368A 11-065 P REF
ION SOURCE CONTROL, 11-065 623960A 11-065 P REF
MOD 11-066 ION SOURCE CONTROL 631900 11-066
MOD 11-066 ION SOURCE CONTROL,CE 638771 11-066
MOD 11-066 ION SOURCE CONTROL,CE 639200 11-066
MOD 11-066 ION SOURCE CONTROL,CE 641550 11-066
MOD 11-066 ION SOURCE CONTROL,CE 645950 11-066
MOD 11-066 ION SOURCE CTRL,QUAD 704099 11-066
MOD 11-066 ION SOURCE CONTROL,CE 707600 11-066
SOURCE CONTROL (4KV ION SOURCE) 607446 11-067
MOD 11-068 ION SOURCE CONTROL 635970 11-068
MOD 11-068 ION SOURCE CONTROL 639400 11-068
MOD 11-069-SCAN GENERATOR 610696 11-069
MOD 11-085 ION SOURCE CONTROL 626870 11-085
OVEN FUNCTION 611047 11-410
MOD 11-420,E BEAM PWR SUPPLY 625530 11-420
MOD 11-420,E BEAM PWR SPLY,CE 636269 11-420
MOD 11-425,E BEAM PWR SPLY 700513 11-425
AES SYSTEM CONTROL 179138 11-500
MOD 11-720 MICRO BEAM ION SOURCE CNTRL 637195 11-720
ASSY-MBIG,ESA CONTROL 642650 11-720
ASSY-MICROBM CNTRL,PRIMARY CS 633706 11-730
MOD 11-770 SPECTROMETER CNTRL 637224 11-770
MOD 11-780 SPECTROMETER CNTR 646535 11-780
MOD 11-780 SPECTROMETER CNTR 646870 11-780
MOD 11-780 SPECTROMETER CNTR 646883 11-780
MOD 11-780A SPECTROMETE 704122 11-780A
MOD 11-781 SPECTROMETER CONTRO 704278 11-781
AMP/DISCRIMINATOR-1182 616850 1182
HYPO HV SUPPLY 14-040 14-040
MOD 15-155A ANALYZER,8" FLANGE 625131 15-155
MOD 15-5000 MTR STAGE,;45/-45D 707582 15-5000
MOD 15-630-PRCN SPECIMEN STAGE 624580 15-630
MOD 15-635 SPEC PARKING ATCH 636196 15-635
SAMPLE FACTURE / PARKING COMBO 15-635 & 535 15-635 & 535
SPECIMEN STAGE 638848 15-6700
MOD 15-680 MOTORIZED STAGE 634625 15-680
MOD 15-680 MTR STAGE 638020 15-680
HEAT EXCHANGER, 16-020 603370 16-020
HEAT EXCHANGER 16-025 16-025
MOD 16-050 HEAT EXCHANGER 624509 16-050
MOD 16-700 DATA AQUISITION 637305 16-700
MOD 16-700 DATA ACQ,TRIFT 651016 16-700
MOD 16-770 DATA ACQ,6700 637725 16-770
AMP/DISCRIMINATOR,16 CHANNEL 619617 160
AMP/DISCRIMINATOR,16 CHANNEL 622348 160
AMP/DISCRIMINATOR,16 CHANNEL 627825 160
AMP/DISCRIMINATOR,16 CHANNEL 629276 160
AMP/DISCRIMINATOR,16 CHANNEL 634579 160
AMP/DISCRIMINATOR,16 CHANNEL 638868 160
QUANTUM, AMP/DISC 640506 160
AMP/DISCRIMINATOR,16 CHANNEL 640832 160
HEATING MODULE 612905 175
STAGE (8 SAMPLE) 612054 178
MOD 18-180, 5 PIN CONNECTOR 636273 18-180 5-PIN
MOD 18-180 6 TO 5 PIN CONVERT 624200 6/5 CONV 18-180 6 TO 5 CONVERT
MOD 18-190 FE E-BEAM PS,5P,CE 642330 18-190
MOD 18-195 FE E-BEAM PS,5P,CE 642332 18-195
MOD 18-196 FE E-BEAM PS,5P,CE 644131 18-196
MOD 187-HEATING MODULE 606205 187
ZALAR MODULE 619172 189
MOD 193 FARADAY CUP 606149 193
MOD 193D F-CUP,MULTI INPUT 633552 193D
MOD 193E F-CUP,MULTI INPUT 646193 193E
MOD 193E F-CUP,MULTI INPUT SIM 646538 193E
MOD 193N F-CUP,MULT IN DUO POL 704251 193N
COOLING MODULE 611790 197
MOD 20-010-ELEC SOURCE CNTL,5KV 642474 20-010
MOD 20-010 E-SOURCE SPLY 5KV(SHV) 649551 20-010
MOD 20-010 E-SOURCE SUPPLY 651042 20-010
MOD 20-040 X-RAY PWR SOURCE 623546 20-040
CPU BD-486DX,66MHZ,32MEG 651608 200421-0-0 QCPU BD
MOD 20-045-ION SOURCE CONTROL,2KV 179146 20-045
ION SOURCE CONTROL (2KV ION) 20-046 20-046
DIGITAL STORAGE MONITOR 609414 20-062
ION SOURCE CONTROL, MOD 20-066 752130 20-066
ASSY-MOD 20-090,2"STPR MTR CNT 633467 20-090
MOD 20-090 STPR MTR CNTRL,2AXS 637276 20-090
MOD 20-290 H/C MODL CTRL (CE) X56184 20-090
ASSY-MOD 20-095,8"STPR MTR CNT 633469 20-095
MOD 20-095 STPR MTR CNTRL,3AXS 637302 20-095
SOURCE CONTROL (5KV ION) 179156 20-115
MOD 20-200 SIMS CONTROL,6700 633717 20-200
MOD 20-290 HOT/COLD MODL CONT 624489 20-290
MOD 20-290 HOT/COLD MDL CNT,CE 640706 20-290
MOD 20-320-DGTL AES SOURCE CONT 608444 20-320
MOD 20-320A-ANLG AES SOURCE CONT 609880 20-320A
SOURCE CONTROL (LAB6 FILAMENT) 611296 20-325
SOURCE CONTROL (LAB6 FILAMENT) 610521 20-325A
MOD 20-327-DGTL SOURCE CONTROL 614588 20-327
HEED CONTROL 610638 20-330
MOD 20-370 E-SOURCE CONTROL 637801 20-370
MOD20-380 C60 IONSOURCE CTRL,10KV 701305 20-380
MOD 20-520-DGTL ION SOURCE CONT 609940 20-520
MOD 20-520A-ANLG ION SOURCE CONT 609941 20-520A
MOD 20-525-DGTL ION SOURCE CONT 636589 20-525
MOD 20-525A-ANLG ION SOURCE CONT 636588 20-525A
MOD 20-530 DUOPLSMTRN SCE CONT 610344 20-530
MOD 20-530A DUOPLASMTRN CONT 610344A 20-530 LG
MOD 20-535 DUOPLSMTRN SCE CTRL 636578 20-535
MOD 20-540-C/ion SOURCE CONT 611059 20-540
MOD 20-610-PWR SPLY,MULTI OPUT 601694 20-610
SOURCE CONTROL 601147 20-620
SOURCE CONTROL 606634 20-620A
MOD 20-622,SOURCE CONTROL ASSY 612246 20-622
MOD 20-625,SOURCE CONTROL ASSY 627951 20-625
MOD 20-625,SOURCE CONTROL ASSY,CE 638506 20-625
MOD 20-625,SOURCE CONTROL ASSY,CE 652805 20-625
MODEL 20-630 SOURCE CONTROL 651700 20-630
ASSY-CTRL,GUN,MODEL 20-630A 704361 20-630A
MOD 20-710 C/ion SOURCE CNTRL 637140 20-710
MOD 20-710 C/ion SOURCE CNTRL 653201 20-710
MOD 20-780 DETECTOR PWR SPLY 637211 20-780
MOD 20-790 DETECTOR PWR SPLY 646536 20-790
MOD 20-790 DETECTOR PWR SPLY 646882 20-790
MOD 20-790 DETECTOR PWR SPLY 704216 20-790
MOD 20-792 DETECTOR POW 702490 20-792
AES/ESCA ANALYZER CONTROL 179161 20-805
AES/ESCA ANALYZER CONTROL 603721 20-805
MOD 20-810-E/A ANALYZER CONT. 611175 20-810
MOD 20-900 INSTRUMENT POWER 637297 20-900
MOD 20-905 INSTR POWER, CE 700885 20-905
MODEL 20-906 INSTR POWE 704160 20-906
CONTROLLER-GAUGE,G-P307(CHMBR) 631979 220307197
CONTROLLER-GAUGE,G-P307(ANALZ) 631981 20307198
CONTROLLER-307 VACUUM GAUGE 632181 20307214
CONTROLLER-G-P358,MICRO ION GA 643765 20358018
CNTLR-GAUGE,GP360 (CHAMBER) 636883 20360174
CNTLR-GAUGE,GP360 (CHAMBER) 636883 20360174
CNTLR-GAUGE,GP360(INTRO/ANALY) 636884 20360175
HYPO HV SUPPLY 22-040 22-040
MOD 25-120A-SCNG AUGER MULTIP 606287 25-120A
MOD 25-130A SAM ANALYZER 620595 25-130
PROD SPEC-MOD 25-130A ANALYZER 620733 25-130A
SAM ANALYZER 25130A 25-130A
ASSY-NIPPLE,MOD 25-140,LOWER 627165 25-140 LOWER ONLY
ASSY-NIPPLE,MOD 25-140,LOWER 650186 25-140 LOWER ONLY
MOD 25-140A F.E. SAM ANALYZER 624880 25-140A, COMPLETE
MOD 25-140B F.E. SAM ANALYZER 642357 25-140B, COMPLETE
MOD 25-140B F.E. SAM ANALYZER 650189 25-140B, COMPLETE
ASSY-NIPPLE,LOWER,25-150A 652821 25-150 LOWER ONLY
MOD 25-150A FE SAM ANAL 652820 25-150A, COMPLETE
ASSY-PCB,257 INTERFACE 622389 257 BD
MOD 257 DUAL DR11C/AT INTFC 622454 257 BD
ASSY-PCB,MOD 258 INTERFACE 631873 258 BD
MOD 265-SMPL PLTN/FRDY, BKLD 624972 265
PCB,16 CHAN DSCRM, 2735PC 619786 2735PC
CONTROLLER-CONVECTRON GA,MINI 633775 275
BOX-FILTER, FE HIGH VOLTAGE 751016 2837C
ASSY PCI DEF INTRFC OPT BD 706262 285 DEFL
ASSY PCI DEF INTRFC MAIN BD 706258 285 MAIN
X-RAY SOURCE CONTROL (15KV) 602890 32-095
MOD 32-096 X-RAY SOURCE CONT 620175 32-096
MOD 32-096 X-RAY SOURCE CONT 630747 32-096
ASSY-XRAY CTRL,32-097 700658 32-097
MOD 32-100 ELECTRON MULTY SUP 604203 32-100
MOD 32-100-ELCTRN MULTR SUPPLY 605986 32-100
MOD 32-100-ELCTRN MULTR SUPPLY 630864 32-100
MOD 32-150-DGTL AES ANALY CONT 605420 32-150
MOD 32-150-DGTL AES ANALY CONT 630867 32-150 CE
MOD 32-180 FE E BEAM PS DSPLY 619236 32-180
MOD-32-350 DEFLECTION 702845 32-350
MOD 32-550 ION SOURCE PULSE CNTRL 621350 32-550
ASSY-AMP/DISC,32 CHAN 648515 32 CHAN AMP/DISC
ASSY-AMP/DISC,32 CHAN 702725 32 CHAN AMP/DISC
ASSY-AMP/DISC, 32 CHAN UPDATE 648515A 32 CHAN AMP/DISC
GAUGE CONTROLLER-GP (INTRO) 627317 350021
GAUGE CONTROLLER-GP (INTRO) 639630 350021-CE
GAUGE CONTROLLER,GP (CHAMBER) 627300 350031
GAUGE CNTRLR-GP,350-CE,MAIN CH 639631 350031"-CE" or "-544A"
GAUGE CONTROLLER, GP350502 712847 350502
GAUGE-MICRO-ION PLUS,O/ 702665 356001
PICOAMMETER 611195 485
485 PICOAMMETER W 488 OPTION 611195A 485 w/ 488 OPTION
MOD 50-096,PS-X RAY,CE 635400 50-096
BOARD, GRID/EXTRA 605589 605589
PCB ASSY-BEAM & FOCUS SUPPLY 605959 605959
ASSY-PCB,AUTO VALVE CONTROL 606052 606052
BOARD, CONTROL, ION SOURCE 606442 606442
ASSY-PCB,CORE,MULTR SPLY,72100 607036 607036
ASSY-PCB,RETARD VOLT,84-360 607127 607127
ASSY-PCB,CONTROL 607216 607216
ASSY-PCB,LENS PWR SPLY,84-360 607219 607219
ASSY-PCB,PASS ENERGY & MULTR 607222 607222
ASSY-PCB,LOCAL PWR SPLY,80-360 607231 607231
BOARD, TFA DEFLECTION 607312 607312
BOARD, MOTOR DRIVE, 1 CHAN 607511 607511
PCB ASSY-MOTOR DRIVE 2 607512 607512
MOTOR CONTROL BD, 5 CHAN 607513 607513
BD. MOTOR CONTROL, 5 CHAN, 607515 607515
ASSY-PCB,PWR SPLY,SPECIALTY 607518 607518
BOARD, TFA SCAN 607539 607539
ASSY-PCB,AES CONTROL 607859 607859
ASSY-PCB,MOTHER,AES RACK VRSN 607879 607879
ASSY-PCB,DIGITAL MEMORY,74-062 608054 608054
PCB ASSY-DEFLECTION,11-067 SOURCE 608083 608083
AES CONTROL PACKAGE 608107 608107
BOARD, MOTOR CONTROL 608316 608316
ASSY-PCB,PWR SPLY,RF GENERATOR 608741 608741
ASSY-PCB,CONTROL,SIMS 609058 609058
BOARD, SIMS POWER SUPPLY 609061 609061
BOARD, LENS DUAL POLARITY 609180 609180
BOARD, RETARD DUAL POLARITY 609181 609181
ASSY-PCB,CORE,QUAD CNTRL,72600 609274 609274
ASSY-PCB,DEFLECTION,COND OBJ 609640 609640
PCB-VIDEO PROCESSOR 610215 610215
ASSY-PCB,DR11/488 CONVERSION 610580 610580
ASSY-PCB,DATA ACQUISITION 610589 610589
BD. MICRO PRCOR, 610711 610711
BD. DIGITAL XYZ, 610714 610714
BD. VIDEO PRCOR, 610717 610717
BD. SCAN PROCOR, 610720 610720
ASSY-PCB,RETARD ENERGY,20-810 610899 610899
ASSY-PCB,SM AREA LENS BIAS 611258 611258
ASSY-PCB,INTERFACE DATA,74-062 611731 611731
BOARD, NEUTRALIZER CONTROL 612049 612049
PCB ASSY-TFA SCAN CONTROL 612088 612088
PCB ASSY-EXTRACT & GRID SPLY 612352 612352
ASSY-PCB,HALF OCTAPOLE DEFL 612882 612882
ASSY-PCB,TFA DEFLECT 612885 612885
ASSY-PCB,DISPLAY,ADDRESS,74062 612914 612914
ASSY-OVEN/PNEUMATIC CNTRL 613059 613059
BOARD, LOCAL POWER SUPPLY 613094 613094
ASSY-PCB,SCAN PROCESSOR 613741 613741
ASSY-PCB,VIDEO PROCESSOR 613897 613897
ASSY-PCB,MICRO PROCESSOR,81175 614127 614127
ASSY-PCB,HI VOLT,SUPPLY,20-327 614287 614287
ASSY-PCB,DIGITAL X-Y-Z 614658 614658
ASSY-PCB,FILMNT/BIAS,20-327 614727 614727
ASSY-PCB,PC INTERFACE,137 616634 616634
BD. CONTROL MULTITEC, 80-365/3 617406 617406
BOARD, RETARD SNGL POL MULTITC 617412 617412
BOARD, PASS MULTITEC 617415 617415
BOARD, LENS SNGL POL MULTITEC 617418 617418
ASSY-PCB,LOCAL PWR SPLY,5602 617421 617421
BOARD, LENS DUAL POL 617476 617476
BOARD, RETARD, DUAL POLARITY 617477 617477
ASSY-PCB,LO NOISE PWR SPLY 618346 618346
ASSY-FILTER 618853 618853
BD. LENS CNTRL, OMNI II, 72-36 619705 619705
BOARD, DASH 16 CHAN COUNTER 619827 619827
BD. DASH SNGL CHAN COUNTER, 619982 619982
BOARD, DASH COUNTER/CONTROL 620012 620012
ASSY-PCB,HT SK,INPUT MOD,74500 620020 620020
ASSY-PCB,SCAN ADD-ON,72-066 620041 620041
BD. 257 INTERFACE, 620083 620083
ASSY-ELECTRODE BIAS SUPPLY 620231 620231
PCB ASSY-NEUTRALIZER CONTROL 620257 620257
PCB ASSY-PWR SPLY,SIMS 620316 620316
ASSY-VALVE,INTERNAL 620584 620584
RBLT VLV, ISOLATION, 25-140 620584R 620584R
ASSY-PCB,GRID BRD,TOF,80-770 620752 620752
ASSY-PCB,CONTROL BRD,80-770 620756 620756
ASSY-PCB,QUAD BRD,TOF,80-770 620764 620764
ASSY-PCB,FOCUS BRD,TOF,80-770 620768 620768
PS-DASH,-4.5/+/-12VAC 620808 620808
FDTHRU-LINEAR MOTION,2.75 CF 620921 620921
BD. RET SNGL P MLTC, 80-365 620971 620971
BD. LENS SNGL P MLTC 80-365/36 620972 620972
BD. DASH QUAD COUNTER, 620982 620982
ASSY-REMOTE,ION SOURCE PULSE CONT 621359 621359
ASSY-PREAMP/AMP DISCRIMINATOR 621360 621360
BD. TOF CONTROL, 80-770 621462 621462
BD. RETARD DUAL P. MULTITEC, 8 621498 621498
ASSY-PCB,LENS PWR SPLY 621501 621501
BD. RETARD SNGL P. MULTITEC, 8 621502 621502
ASSY-PCB,PASS ENERGY,DUO POL 621504 621504
IEEE-488 OPTION-KEITHLEY 485 621568 621568
ASSY-PCB,LO SPEED ECL MODULE 621681 621681
ASSY-PCB,DIGITAL X-Y-Z 621686 621686
BD. LENS CNTRL, OMNI III, 72-3 621859 621859
ASSY-PCB,MCD CONTROL,72-152 621870 621870
ASSY-PCB,DRIFT BRD,TOF,80-770 621932 621932
ASSY-PCB,AES CONTROL 621992 621992
ASSY-PCB,DISPLAY ADDRESS 622404 622404
ASSY-PCB,INTERFACE DATA 622408 622408
ASSY-PCB,CONTROL/COUNTER 622461 622461
ASSY-PCB,HT SK,COUNTER,QUAD 622465 622465
ASSY-PCB,QUAD COUNTER 622466 622466
ASSY-PCB,16 CHAN CNTR,MULTI CH 622470 622470
ASSY-PCB,RETARD VOLT,DUO POL 623835 623835
ASSY-PCB,RETARD VOLT,SGL POL 623836 623836
ASSY-PCB,OMNI 3 LENS SUPPLY 623847 623847
ASSY-PCB,CORE,MULTR SPY,72-100 624139 624139
ASSY-PCB,72-105 MULTR SPLY COR 624140 624140
PS-RF GEN CONTROL 624175 624175
ASSY-PCB,RF GEN CNTRL,72-700 624183 624183
ASSY-PCB,MOTOR DRIVE 2 624832 624832
ASSY-PCB,MOTOR DRIVE SCAN 624833 624833
ASSY-PCB,MOTOR DRIVE 5 624835 624835
ASSY-PCB,PWR SPLY,SIMS 624876 624876
DIGITAL I/O BR FOR PC AT,32BIT 624949 624949
ASSY-PCB,XPS SCAN CONTROL 625011 625011
ASSY-PCB,TDC INTERFACE,72-737 625094 625094
BD. TOF NEUTRALIZER 72-090 625314 625314
ASSY-PCB,CPU,DIGITEL 500 625462 625462
ASSY-PCB,MACH 8 ELECTRONICS 625663 625663
ASSY-PCB,TFA SCAN CONTROL 625878 625878
ASSY-PCB,VIDEO PROCESSOR 625906 625906
ASSY-PCB, HI SPD DEFL AMP 626479 REV E 626479 REV E
ASSY-PCB,HI SPD DEFL UNREG PS 626491 626491
ASSY-PCB,GAUZE LENS DEFLECTION 626502 626502
ASSY-PCB,GAUZE LENS SUPPLY 626512 626512
ASSY-PCB,JUNCTION 626536 626536
ASSY-PCB,NEUTRALIZER CTRL,25V 626544 626544
ASSY-PCB,NEUTRALIZER CTRL,75V 626546 626546
BD-16 CHL MUX/CONDITION, 626567 626567
ASSY-PCB,LEAK VALVE CONT 626639 626639
ASSY-PHASE CONTROL 626807 626807
RS232/IEEE488 CONVERTER 626859 626859
PCB-MOTION CONTROLLER 626874 626874
PS-110/220VIN,+/-5,+/-12,375W 627020 627020
ASSY-PCB,MOTOR AMP,3 AXIS,PT 627111 627111
ASSY-PCB,DR11 DAC, MOD 72-085 627702 627702
ASSY-PCB,NEUTRAL CTRL,Q2000 629398 629398
ASSY-PCB,LONG PULSE BLANKER 629707 629707
ASSY-PCB,DEFLECTION AMP 629808 629808
RBT, CONDENSER LENS, EXCHANGE 630063R 630063R
ASSY-OVEN/PNEUMATIC CONTROL 630544 630544
ASSY-PLATEN BASE,AUX XFR BOX 631063 631063
ASSY-PCB,SHUTTER BIAS,Q2000 631652 631652
ASSY-XTAL HEATER CONTROL 631675 631675
INTRPL BOX-10X 632030 632030
ENCODER-LINEAR,10X,170ML,0.5UM 632032 632032
GEARHD-PLANET,100:1,LOW BAKLSH 632048 632048
ASSY-MODULE,HV,SECONDARY 632534 632534
ASSY-MODULE,LV,DC SUPPLY 632535 632535
ASSY-MODULE,PS,DET OPT #3 632551 632551
ASSY-MODULE,HV,CS PRI COLUMN 632554 632554
ASSY-MODULE,CS SOURCE CONTROL 632555 632555
ASSY-MODULE,CS SOURCE CONTR 632555A 632555A SMALL SHV
ASSY-BOX,SEM AMPLIFIER,TRIFT2 632556 632556
ASSY-PCB,250V POWER SUPPLY 632640 632640
ASSY-PCB,PWR FACTOR CORRECTION 632653 632653
ASSY-TDC INTERFACE MODULE 632823 632823
ASSY-PCB,DSIMS RASTER 632836 632836
ASSY-PCB,ION COUNTER 632842 632842
ASSY-BOX,F-CUP,MULTI INPUT 632985 632985
PCB CARD-FRAME GRABBER,PRO24 633002 633002
ASSY-BOX,BLANKER,LMI,TRIFT II 633030 633030
ASSY-MAGNETIC INTRO,8" TRIFTCE 633474 633474
ASSY-BREAKOUT,LOW VOLTAGE 633564 633564
ASSY-PCB,MACH8 ELEX,CE VERSION 634584 634584
ASSY-PCB,MOD 258 CONNECTOR BRD 634591 634591
ASSY-MODULE,DATA ACQ,6650 635733 635733
CARD-NI 488 PCI BUS 636021 636021
ASSY-PCB,CONTROL,SIMS 73-057A 636134 636134
ASSY-PCB,HANDSHAKE BOARD 636526 636526
ASSY-PCB,JUNCTION 636889 636889
WLDMT-BELLOWS,2" STAGE,TFS 637045 637045
ASSY-BOX,CPD6,PREAMP DISCRM 637079 637079
ASSY-PCB,RASTER,TRIFT2 637160 637160
RASTER BD. TRIFT97, TRIFT II 637160 E 637160 E
RASTER BD, TRIFT III 637160 F 637160 F
ASSY-AUX PWR SPLY,ADEPT 1010 637857 637857
ASSY-DRIVE,ROT AXIS,STG,15-680 638022 638022
ASSY-PWR SPLY,FLTG,SED PREAMP 638092 638092
ASSY-PCB,CONTROL,ION SOURCE 638826 638826
ASSY-DRIVE,MANIPULATOR 639690 639690
ASSY-MODULE,CS SRCE CTRL,DSIMS 639935 639935
ASSY-PCB,GAUZE LENS SUPPLY 640502 640502
AMP/DISCRIMINATOR,16 CHANNEL 640505 640505
ASSY-PCB,OMNI 3 LENS SUPPLY 640612 640612
ENCODER-LINEAR,10X,2.7"TRAVEL 640633 640633
PC BOARD-EXP QUAD SERIAL,PCI 641313 641313
ASSY-PWR SPLY,FLTG,SED PREAMP 641715 641715
ASSY-PWR SPLY,200V,FIB,S-TOOL 642296 642296
ASSY-SYSTEM BAKE CONTROL,TRIFT 642498 642498
LMI SOURCE-DBL LENS,EVA,W/ISOL VL 642807 642807
LMI SOURCE-DBL LENS,EVA,6" FLG 642808 642808
ASSY-BOX,F-CUP,PREAMP-DSIMS 642844 642844
ASSY-ROTARY AXIS FDBK 643015 643015
BD-FRAME GRABBER,PCVISION 643831 643831
BD-MOTOR CONTROL,MEI 643940 643940
ASSY-MOTOR CABLE INTFC,S-TOOL 643948 643948
ASSY-BAKE CTRL,INTGRD PLC,S-TL 644481 644481
ASSY-BLANKER UNIT,FIB,S-TOOL 644647 644647
ASSY-BREAKOUT,LOW VOLTAGE 645021 645021
ASSY-AUX PWR SPLY,48V,S-TOOL 645155 645155
PC BOARD-EXP QUAD SERIAL PCI 645342 645342
ASSY-PCB,MOTOR AMP,3 AXIS,PT 645454 645454
SPUTTER VOLTAGE POWER SUPPLY 646392 646392
ASSY-STAGE,SMART-TOOL 647408 647408
ASSY-JUNCTION BOARD 647472 647472
PCB CARD-FRAME GRABBER,MV LITE 647518 647518
ASSY-CONTROL, ELEV, S-TOOL 647711 647711
ASSY-EMBEDDED PC,CE VERSION 647789 647789
ASSY-PCB,OCT.GZ.LNS,CTRL SPLY 647936 647936
ASSY-PCB,MACH8 ELEX,CE ALT,ADD 648286 648286 QUANTERA
METER-PICOAM,AUTORANGE 650524 6485
ASSY-PCB,CONTROL ROTARY 649062 649062
ASSY-PCB OCT.GZ.LNS.CTRL DEFL 649228 649228
FLG ASSY-BELLOWS,8" STAGE 649393 649393
CONTROLLER, 3 AXIS,LC/DSP REV8 649833 649833
RBT, ASSY-GAUZE LENS 655002R 655002R
FILER-ASSY 650312 650312
ASSY-MOTOR CABLE INTFC,S-TOOL 650932 650932
RASTER BD.TRIFT III w GAS SOURCE 651021 651021
ASSY-PCB,GATE GEN/SER IO,T3 651024 651024
ASSY-PCB,SCAN PROCESSOR 651828 651828
ASSY-PCB, OCT GZ LENS CTRL DEF 652809 652809
ASSY-NIPPLE,UPPER,MOD 25-140B 642363 670 UN 5-PIN
ASSY-NIPPLE,UPR,25-140B(SPARE) 645521 670 UN 5-PIN
ASSY-NIPPLE,UPR,25-140B 650188 670 UN 5-PIN
ASSY-NIPPLE,UPPER,MOD 25-140A 627687 670 UN 6-PIN
ASSY-NIPPLE,UPPER,25-150A 652812 700 UN, 5-PIN
ASSY-PCB,GATE GEN/SER IO,T3 700126 700126
BUS-BRIDGE,PCI-ISA,PCI-ISU04F 700214 700214
ASSY PCB 11-425 CONTROLLER 700665 700665
ASSY-PCB,DEFL AMP.QUANTERA 700721 700721
ASSY-JUNCTION BD,DIFF-PMP 701286 701286
ASSY-STAGE,MM100, NANOTOF 701640 701640
ASSY-JUNCTION BOARD 701970 701970
ASSY-BOX,BUNCHER PULSER,CE 640686 702
ASSY-MOD 702,BUNCHER PULSER CE 700684 702
ASSY-PCB/HOUSING,DETECT 702182 702182
PCB CARD-FRAME GRABBER,IMPACT- 702866 702866
BD-ANALOG INPUT, CIO-DAS1402/1 703060 703060
ASSY_PCB 16CH CNTRL,MULTI CH,P 703074 703074
ASSY-CARD RACK POWER SU 704138 704138
ASSY-BREAKOUT,LOW VOLTA 704139 704139
ASSY-PCB,MACH 8, CE, LOW CH 704196 704196
ASSY-PCB,MACH 8, CE, HIGH CH 704197 704197
ASSY-PCB, GAUZE LENS DEFLECTIO 704268 704268
ASSY-PCB, GAUZE LENS SUPPLY 704270 704270
ASSY-PCB,RETARD,3 RANGE,1600,3 704274 704274
SED AMP, TRIFT 97 633553 705
MOD 705A SED AMPLIFIER 701057 705A
ASSY-TERMINATOR,SCA,VERSA 706021 706021
ASSY-NEUTRALIZER,VERSA 706491 706491
ASSY PCB GATE FOR JUNCTION 703653 706653
CONV-USB SERIAL COMM D9M/8P 707125 707125
ASSY-PCB,CONTROL,ROTATOR,3 RAN 707974 707974
ASSY-PCB,LOCAL PWR SPLY,5602 710730 710730
CARD-NI 488 PCI EXPRESS BUS 710851 710851
MOD 72-090 NEUT CONTROLLER 624946 72-090
PCB-TDC INTERFACE,72-737 625093 72-737
MOD 725 COLD STAGE CNTROLLER 637670 725
ASSY-MOD 726,COLD STAGE CTRL, 750853 726
LMIG BLANKER CONTROL 633550 730
ASSY-BOX,C/ion BLANKER,DUAL 633031 731
ASSY-BOX,POST ESA/HI-MASS BLKR 633035 731
DUAL BLANKER CONTROL 633551 731
ASSY-BOX,DUAL BLANKER 639461 731
ASSY-DUAL BLANKER 646027 731
ASSY-DUAL BLANKER,50 OH 704189 731
ASSY-DUAL BLANKER 701732 731M
MOD 74-062-MON IMAGE STOR CONT 612235 74-062
MOD 74-100 GAUZE LENS CONTROL 626875 74-100
CONTROL-ION NEUTRALIZER 750631 741
ASSY-E-NEUTRALIZER,MODEL 742 750641 742
ASSY-USB TO FIBER SERIAL 750012 750012
ASSY,PCB,USB TO DR11 CONVERTER 750112 750112
ASSY-USB TO FIBER SERIA 750691 750691
ASSY-PULSER,SAMPLE BIAS,5KV,RO 752410 752410
MOD 76-LMI PULSER ASSEMBLY 629200 76
ASSY-PCB,SCAN CONTROL,77-072 616529 77-072
BOX-PICOAMMETER BIAS,90V 611211 78
MOD 78-PICO AMMETER BIAS,90V 621335 78
MOD 78-PICO AMTR BIAS,90V,CE 638159 78
ASSY-DEFLECTION CNTRL 630365 780
MOD 780 DEFLECTION CONTROL 633554 780
ASSEMBLY-MOD 79-BIAS BOX 647312 79
MOD 790 TDC PRE-AMP,TRIFT97 640685 790
MOD 80 BIAS POWER SUPPLY 628995 80
LASER HEAD-ZYGO 644866 8070-0902-01
EUROTHERM CONTROLS 818 818, 919
EUROTHERM CONTROLS 919 818, 919
CONT-TEMP,-200 TO +1000C,818S 624259 818S
EUROTHERM CONTROL 818S 818S
DATA ACQ,MODEL 910,T&C 750652 910
ASSY-TDC,MODEL 915,T&C 750661 915
STAGE CTRL,MODEL 920, T&C 750672 920
STAGE CTRL,8 AXIS,MODEL 921,T& 750682 921
MOD 925, TDC PREAMP,T5, T&C 750716 925
V/F BOX 602013 96
V/F BOX 605978 96A
MOD 96B V/F PREAMP 621800 96B
MOD 97-SED PREAMP 602014 97
MOD 98-SED PREAMP 631600 98
MOD 98A-SED PREAMP 638048 98A
MOD 98A-SED PREAMP 643357 98A
MOD 99-ABSORB CURRENT PREAMP 609043 99
DRIVER BOX-VER 1,W/O LC CKT 645176 AB1-1-0
ALCATEL 2010 ROUGH PUMP ALC 2010 ALC 2010
PUMP,ROUGHING,220V/ALCATEL 244-00004 ALC 2012A
ASSY-UNIT AUTO VALVE CONTROL 607147 AVC
ASSY-UNIT,AUTO VALVE CONTROL 613524 AVC
ASSY-UNIT,AUTO VALVE CONTROL 630489 AVC
ASSY-UNIT,AUTO VALVE CONTROL 631827 AVC
ASSY-AUTO VALVE CTRL REMOT UNT 606225 AVC REMOTE
ASSY-AUTO VALVE CTRL REMOT UNT 630486 AVC REMOTE
BOX-FILTER,FE HV,BERTAN 642327 BER 2837
BOX-FILTER,FE HV,BERTAN 645033 BER 2837A
BOX-FILTER,FE HIGH VOLTAGE 650382 BER 2837B
BOOSTIVAC-208VAC, 60HZ 605487 BOOSTIVAC
ION PUMP SUPPLY 1001504 BOOSTIVAC
BOOSTIVAC-208V,50/60HZ 1002609 BOOSTIVAC
BOOSTIVAC, 120 V 1003714 BOOSTIVAC
ULTEC ION PUMP SUPPLY 2220410 BOOSTIVAC
BOOSTIVAC-220V,50HZ 2240630 BOOSTIVAC
PS-BOOSTIVAC 2240635 BOOSTIVAC
1322-1300 COHO COLOR CAMERA 628952 CAMERA COHO
1322-1300 COHO COLOR CAMERA 630477 CAMERA COHO
2122-1000 COHO B&W CAMERA 629480 CAMERA COHO
TURBO PUMP TMU071,DCU100 644472 DCU001
DCU100 CONTROL ONLY 644472 A DCU001
TURBO PUMP TMU 261,DCU 200 644468 DCU200
TURBO PUMP TMU521,DCU300 644475 DCU300
DIG III ION GAGE CONTROL 606430 DIG III SP
DIG III GAUGE CONTROL 1500174 DIG III SP
DIG III GAUGE CONTROL 6050600 DIG III SP
DIG III GAUGE CONTROL 6050600A DIG III SP & INTFC
DIG III ION GAGE CONTROL 606430A DIG III SP & INTFC
DIGITEL 1500 2221500 DIGI 1500
DIGIPAK-6KV SPLY,POSITIVE OUT 2220272 DIGI 270
DIGIPAK-6KV SPLY NEGATIVE OUT 2220275 DIGI 270
DIGITEL 500 2220400 DIGI 500
PANEL-FRNT,DIGITEL 500G 622786 DIGI 500G
DIGITEL MPC-100/100MA,W/TSP OP 633715 DIGI MPC
DIGITEL MPC-W/ONE 100MA SPLY 635941 DIGI MPC
DIGITEL MPC-W/ONE 500MA SPLY 635942 DIGI MPC
DIGITEL MPC-W/TWO 100MA SPLYS 635943 DIGI MPC
DIGITEL MPC-W/TWO 500MA SPLYS 635944 DIGI MPC
DIGITEL MPC-W/100 & 500MA SPLY 635945 DIGI MPC
DIGITEL MPC-500MA,W/TSP OPT 638776 DIGI MPC
DIGITEL MPC-100/500MA,W/TSP OP 638779 DIGI MPC
DIGITEL MPC-WHT PNL,100MA SPLY 638851 DIGI MPC
DIGITEL MPC-WHT PNL,500MA SPLY 638852 DIGI MPC
DIGITEL MPC-WHT PNL,2-100MA SP 638853 DIGI MPC
DIGITEL MPC-WHT PNL,2-500MA SP 638854 DIGI MPC
DIGITEL MPC-WHT PNL,100/500 SP 638855 DIGI MPC
DIGITEL MPC-BLK PNL,500MA SPLY 639928 DIGI MPC
DIGITEL MPC-BLK PNL,100/500 SP 639931 DIGI MPC
DIGITEL MPC-BASIC 640715 DIGI MPC
DIGITEL MPC-BASIC 643325 DIGI MPC
DIGITEL MPC-100/500(2 OUT),TSP 643865 DIGI MPC
ASSY-DIGITEL MPCII-BASIC 649128 DIGI MPC II, 1 OUTPUT
DIGITEL MPC-BASIC W/O SUPPLIES X56203 DIGI MPC
DIGITEL MPC-100/100MA,W/TSP OP 751051 DIGI MPC E
DIGITEL MPC-500MA,W/TSP OPT 751052 DIGI MPC E
DIGITEL MPC-100/500MA,W/TSP OP 751053 DIGI MPC E
DIGITEL MPC-100/500(2 OUT),TSP 751054 DIGI MPC E
DIGITEL SPC 647586 DIGI SPC
ION PUMP SUPPLY 2220360 DUAL PWR
ION PUMP SUPPLY DUAL PWR DUAL PWR
PUMP-ROT V, DUO10M, 200/240V 649405 DUO10M
ROUGH PUMP DUO2.5 SW DUO2.5 SW
ROUGH PUMP DUO2.5A DUO2.5A
ASSY-EMO SWITCH BOX 628596 EMO BOX
PUMP-SCROLL,18 M3/HR,1-PHASE 644031 ESDP12
ASSY-16 CHL MUX/COND,EXP-16 629240 EXP-16A
KEITHLEY BD 16 CHAN MUX/COND 634838 EXP-16A
PC-TOSHIBA FA3100 MOD6110, XP 700170 FA3100
ASSY-LMIG, HV, WITH CABLE MOD 633567 W / CABLE MOD FEI AX35PPEN/8A/8
SOURCE-LMI W/DIFF PUMPING,TRIFT 633377 FEI MOD# 20200
MOD FIG-5CE ION SOURCE 648158 FIG-5
ASSY-LIGHT SOURCE,MODIFIED 642342 FOSTEC, 20500
20750 LIGHT SOURCE, FOSTEC 630471 FOSTEC, 20750
LIGHT SCE-FOSTEC EKE 648341 FOSTEC, 20800
LIGHT SCE-FOSTEC EJA W/REMOTE 648342 FOSTEC, 20800
LIGHT SCE-FOSTEC 8300 W/REMOTE 625069 FOSTEC, 8300
PULSER-HIGH VOLTAGE,12V 117-00002 GHTS-60
PUMP-ROT V,GLD-136C,1PHA 706168 GLD-136C
PUMP-ROT V,GLD-201B,1PHA 706169 GLD-201B
CHILLER-RECIRCULATR,4.5KW,60Hz 643551 HX-150, CHILLER
ROBOT MECHANICS IDE 772027 IDE 772027
ROBET ELECTRONIC MODULE IDE 772032 IDE 772032
ROBOT MECHANICS IDE 772039 IDE 772039
ROBOT ELECTRONICS MODULE IDE 772044 IDE 772044
PREALIGNER IDE 775000 IDE 775000
PREALIGER, HIGH CAPACITY IDE 775003 IDE 775003
CONTROL-20KV C60 HV PWR 707373 ION C60-20
RBLT C60 CARTRIDGE ION D1730AR ION D1730AR, 10 KV
RBLT C60 CARTRIDGE, 20 KV ION D1743AR ION D1743AR, 20 KV
ASSY-IONIZER,04-300, FIL REPLA 614423 IONIZ300
04-303 IONIZER 627906 IONIZER
ASSY-IONIZER, 06-350 647104 IONIZER LL
ASSY-IONIZER, 06-350/QUANTUM 630957 IONIZ-Q
ASSY-IONIZER,MOD 06-350,Q2K 702056 IONIZ-Q
ION PUMP SUPPLY 2220200 IONPAK
IONPAK-POS POL,SHV,115/230VAC 2220242 IONPAK
JOYSTICK-2 AXIS SERIAL 638250 JOYSTICK, 2 AXIS
JOYSTICK-3 AXIS SERIAL 635801 JOYSTICK-5 PIN
JOYSTICK-3 AXIS SERIAL 635801A JOYSTICK-6 PIN
JQE-25-20 KEPCO POWER SUPPLY KEPCO-1 KEPCO-1
JQE-36-15 KEPCO POWER SUPPLY KEPCO-2 KEPCO-2
PS-115VIN,0-36V/15A,I-LIM,MOD 622106 KEPCO-2, JQE-36-15
CAMERA-COLOR,HITACHI,12VDC 702872 KP-D 20 BU
RBT,CONDENSER LENS ADEPT 655001R LENS, COND, ADEPT
RBT, CONDENSER LENS 655000R LENS, COND, TRIFT
PUMP-ROT V,LH D16B 630104 LEY D16B
ROUGH PUMP, LEYBOLD D2A LEY D2A
PUMP-ROT V. 220 V, 1 PHASE LEY D4B LEY D4B
PUMP-ROT V,LH,100-240V,50/60HZ 635601 LEY D5E
CONTROLLER-TURBO PUMP,MAG LEV 630101 LEY NT340M
PUMP-TURBO,270L/S,MAG LEV,L-H 630100 LEY TMP340
PUMP-TURBO,340L,6"CFF 633544 LEY TMP340
PUMP-TURBO,340L/S MAG-LE, 8" CFF 700331 LEY TMP340
PUMP-TURBO,340L/S,MAG LEV,L-H 639324 LEY TMP340 MIN
PS-5V,17A,LOS-V-5 OBSOLETE 177023 LOS-V-5
LAMBDA, 28 VOLT SUPPLY 476138 LOS-W-28
(OBS)PS-28V,3.1A,LOS-X-28 278009 LOS-X-28
PS-20V,2.4A,LOS-Y-20 177028 LOS-Y-20
MAGNETIC TRANSFER ROD-15 INCH 621663 MAG INTRO
MAGNETIC TRANSFER ROD-18 INCH 628992 MAG INTRO
ROD-INTRO,20" 631059 MAG INTRO
FDTHRU-LIN ROT,2.75 OD,14IN TR 632104 MAG INTRO
ROD-INTRO,LIN/ROT,22"STROKE 635003 MAG INTRO
FDTHRU-LIN/ROT MAGNETIC,15.5" 637618 MAG INTRO
MAGNETIC TRANSFER ROD-27 INCH 638616 MAG INTRO
FDTHRU-LIN ROT,2.75",14"TR 639375 MAG INTRO
ROD-INTRO,LIN/ROT,22",PRECISN 641172 MAG INTRO
FDTHRU LIN ROT MAG 13.5" 646646 MAG INTRO
FDTHRU-LIN/ROT,MAGNETIC,14 IN 646689 MAG INTRO
FDTHRU-LIN/ROT,15.5",MAGNET/SW 646694 MAG INTRO
FEEDTHRU-LIN/ROT MAGNETIC,14IN 646880 MAG INTRO
FEEDTHRU-LIN/ROT,200MM TRIFT 646943 MAG INTRO
FDTHRU-LIN/ROT, 16", MAGNET/SW 646948 MAG INTRO
MAGNETIC TRANSFER ROD, 712481 MAG INTRO
FDTHRU-LIN/ROT MAGNETIC,15" 351-00029 MAG INTRO
MAG INTRO, 18.5" (SPECIAL) DBLOP-12 MAG INTRO
INTRO-SLIDING SEAL,2IN 633470 MAG INTRO ASSEM
INTRO-MAGNETIC,2IN 633472 MAG INTRO ROD
LIGHT-SRC, HOYA MEGALIGHT 100 700087 MEGALIGHT 100
MOD 199 ZALAR ROTATION MODULE 618316 MOTOR/GEAR DRIVE
MOD 174 ZALAR ROTATION MOTOR 619399 MOTOR/GEAR DRIVE
DRIVE-MOTOR SCANNING 620166 MOTOR/GEAR DRIVE
DRIVE-MOTOR SCANNING,EXTENDED 621059 MOTOR/GEAR DRIVE
ASSY-AUTOMATED STAGE MODULE 622954 MOTOR/GEAR DRIVE
FDTHRU DRIVE UNIT-4:1,TILT X54364 MOTOR/GEAR DRIVE
FDTHRU DRIVE UNIT-5:1,Z-AXIS X54365 MOTOR/GEAR DRIVE
FDTHRU DRIVE UNIT-10:1,Y-AXIS X54366 MOTOR/GEAR DRIVE
FDTHRU DRIVE UNIT-10:1,X-AXIS X54367 MOTOR/GEAR DRIVE
MOD 199 ZALAR ROTATION (95MM) X56256 MOTOR/GEAR DRIVE
ASSY-PCB,MICROPROCESSOR/MEMORY 624424 MP-91
DIAPHRAGM MVP035-2 MVP035-2
OMICRON VUV DIGI POWER SPPLY OMI NG HIS13 NG HIS13
SOURCE-LMI,PULSED,30KV UHV 702036 ORS 4111000000
ASSY HV ELECT,LMIG 30KV W/PNL 702037 ORS 4121300000
CONTROL BOARD, MAIN ORS 4121331000 ORS 4121331000
ORSAY, HV CABLE, UPDATED 702045 ORS 4121410200
ORSAY, HV CABLE, UPDATED ORS 4121410200 ORS 4121410200
MVA CONTROL, 30KV LMIG 702042 ORS 4121500000
REBUILT ORSAY CARTRIDGEW/ORSAY AU 702089R ORS EMITTER/CARTRIDGE
ASSY-PCB,MULTIPRT CNTRLR PC/8 627473 PC/8 DIGI BD
ASSY-PCB,MLT_PRT CNTRLR 8-ISA 647786 PC/8 DIGI BD CLASSIC
BD. SPECVIEW BOARD PC-14B PC-14B
PS-CARD RACK,ABSOPULSE 639601 PEL265-Q4683
IMBEDDED PC PENTA 386 PENTA 386
IMBEDDED PC PENTA 486 PENTA 486
PS-AC/DC QUAD OUT,500W,24V@4A 632101 PFC0500-4DH-Z
PM2973A-2-4, 45A, PIONEER SUPP 613337 PIONEER
PM2676A-2-4, 30A, PIONEER SUPP PIONEER PIONEER
PS-20KVDC,50MA,180-253VAC IN 700661 PS/EQ020P050GE7
PULSER-SAMPLE BIAS 646440 PULSER-SAMPLE BIAS
ASSY-PCB,LEAK VALVE CONTROL 636890 Q LEAK
ASSY-TRANSFER ARM 626757 Q SAMP HAND
ASSY-SAMPLE HANDLING PLATFORM 628400 Q2000 STAGE
BD-ANALOG INPUT,DAS-1402 626565 QBD ANA IN
QC120-AR METRONICS,QUADRA-CHECK 705223 QC 120 AR
METRONIC SPS, QUADRA-CHECK QC 120 AR QC 120 AR
METRONICS X-Y DISPLAY QC1200-AR-MT QC1200-AR-MT
ASSY-PCB,CONTROL 623839 QCONTRL BD
ASSY-NEUTRALIZER-DEFL CONT 615726 QDEFL BD
ASSY-EMBEDDED PC,CE VERSION 634716 QEMBED PC
HEAT EXCHANGER 626811 QHEATEXCH
BD-I/O,24BIT PARALLEL,PIO-24 631800 QI/O BD
ASSY-ION SOURCE,NUDE,5KV 626863 QION QUANTUM
ASSY-ION SOURCE,NUDE,5KV 631010 QION QUANTUM
ASSY-ION SOURCE,NUDE,5KV 645297 QION, QUANTERA
ASSY-PCB,HI SPD DEFL PWR SPLY 626483 QISPASSY
ASSY-PCB,HI SPD DEFL UNREG PS 639535 QISPASSY
ASSY-PCB,JUNCTION 640680 QJCT BD ASSY
ASSY-PCB,LENS PWR SPLY,SGL POL 621852 QLENS BD
RF GEN-QMH 400-1 128 AMU,16MM 624985 QMH-400
RF GEN-QMH 400-5 512 AMU, 8MM 624986 QMH-400-5
RF GEN-QMH 410-1 1024 AMU, 8MM 624987 QMH-410
RF GEN-QMH 410-2 2048 AMU, 8MM 624988 QMH-410
RF GEN-QMH 410-3 341 AMU,16MM 624989 QMH-410-3
MODEM-EXTERNAL 626857 QMODEM
ASSY-PCB,MUX BRD 626425 QMUX BD
ASSY-NEUTRALIZER,QUANTUM 636233 QNEUT
ASSY-PCB,MOD 72-085A NEUT CONT 636202 QNEUT CTL
ASSY-PCB,PASS ENERGY,80-365 620975 QPASS ENBD
ASSY-PCB,FLASH ELECTRONICS 626553 QPCB ELECT
ASSY-PCB,FLASH ELEX,CE VERSION 634763 QPCB ELECT
CONTROLLER-3 AXIS,LC/DSP 629459 QPCBMOTION
ASSY-SYSTEM BAKE CNTRL,Q2K 644663 QPHASE CTL
ASSY-SYSTEM PNEUMATIC CONTROL 626825 QPNEU CTL
ASSY-PCB,LOCAL PWR SPLY,24V-IN 640606 QPOWRSUPBD
ASSY-PCB,RETARD VOLTAGE 628080 QRETARD BD
ASSY-SPECIMEN STAGE 634891 QSAMP HAND
ASSY-TERMINATOR,SCA 626873 QSCA TERM
BD-SCSI,TARGET 624146 QSCSI
ASSY-TSP CTRL,PHI VER,SIDE OUT 640697 QTSP ASSY
ASSY-QUANTERA TERMINATOR 649058 QUANTERA TERMINATOR
VIDEO FRAME GRABBER BD W/2 MB 626457 QVIDEO BD
X-RAY SRC ELECTRON SOURCE OPTICS 626814 QXRAY SO
XRAY SCE ELECTRON SOURCE OPTICS 647133 QXRAY SO
XRAY SOURCE SCE ELECT SOURCE,OPTI 651603 QXRAY SO
XRAY SOURCE SCE ELECT SOURCE,OPTI 706548 QXRAY SO
UPDATED, X-RAY SRC OPTICS 626814U QXRAY SO, UPDATED
POWER SUPPLY RAI 302060001 RAI 302060001
BATTERY RAM BOARD RAI 302060002 RAI 302060002
IEEE488 INTERFACE BOARD RAI 302060003 RAI 302060003
I/O BOARD RAI 302060004 RAI 302060004
DAC/INCREMENTAL BOARD RAI 302060005 RAI 302060005
RELAY BOARD RAI 302060006 RAI 302060006
CPU BOARD WITH RTX RAI 302060007 RAI 302060007
MOTOR DR BRD,10 W,(X,Y,Z,R,T) RAI 302060008 RAI 302060008
SICO INTERPOLATION PCB RAI 302060010 RAI 302060010
RAITH JOYSTICK RAI JOYSTICK RAI JOYSTICK
RAITH LASER SOURCE RAI LASER RAI LASER
L RAITH LASER CONTROL RAITH LASER CNT RAI LASER
RAITH LASER CONTROL RAITH LASER CNTL RAI LASER
RAITH STAGE MOTOR CONTROL RAITH MOTOR CNTL RAI MTR CNTL
RAITH MOTOR CONTROL CE RAITH MOTOR C RAI MTR CNTL CE
RAITH X INTERFEROMETER RAI X INTERF RAI X INTERF
RAITH Y INTERFEROMETER RAI Y INTERF RAI Y INTERF
STAGE-200MM,LASER,RAITH 630490 RAITH SMART STG
THERMOVALVE CONT UNIT-RVG 050 611470 RVG-050
THERMOVALE CNTRL RVG-050A 611470A RVG-050A
TERMOVALVE CNTROL RVG-050B 611470B RVG-050B
THERMOVALVE CONT UNIT,RVG 050C 652187 RVG-050C
THERMOVALVE CNTRL, RVG-050C 611470C RVG-050C
SPM3U6V6E1, POWER-ONE SUPPLY 632133 SPM3U6V6E1
SPM3V6A6D4, POWER-ONE SUPPLY 635421 SPM3V6A6D4
KIT-UPDATE, PIONEER TO POWER-1 704343 SPM3V6A6D4, KIT
ASSY-MODULE,SYS VAC CNTRL 632942 SVC
ASSY-SYSTEM VACUUM CONTROLLER 643330 SVC
ASSY-MODULE,CS SOURCE CONTROL 02-04721 TCESSOUCTL
TURBO CONTROL TCP040 TCP040
DRIVE-ELEC,PFEIFFER,TCP121 627718 TCP121
DRIVE-ELEC,PFEIFFER,TCP121,CE 640698 TCP121
DRIVE-ELEC,PFEIFFER,TCP350,CE 648745 TCP350
DRIVE-ELEC,PFEIFFER,TCP380 634858 TCP380
DRIVE-ELEC,PFEIFFER,TCP380,CE 640699 TCP380
TURBO ELECTRONICS TCS303 TCS303
ASSY-MODULE,TDC 649305 TDC, NEW VERSION
ASSY-MODULE,TDC 02-05362 TDC, OLD VERSION
ASSY-FILTER,DMCP,PA 02-05037 TDMCP/PA
ELECTRON SOURCE TE GUN TE GUN
ASSY-TERMINATOR,ESCA 618449 TERMINATOR
ASSY-F/CUP AMP BOX,Cs PRI 02-04603 TFARACPAMP
ASSY-MODULE,INSTR POWER SUPPLY 632538 TIIINSPWRSUP
PUMP-TURBO,TMU071, ONLY 644471 TMU071
PUMP-TURBO,TMU071 WITH TC600 710306 TMU071/TC600
TURBINE WITH SWITCHER SUPPLY TSU071/TC600 TMU071/TC600
PUMP, TURBO,TMU 260 PFEIFFER 244-00021 TMU260
PUMP-TURBO,TMU261,W/CONTROLLER 644467 TMU261
PUMP-TURBO,TPU520 PFIEFFER 633361 TMU520
PUMP-TURBO,TMU521,W/CONTROLLER 644474 TMU521
PUMP PKG-190L/S TURBO 630275 TPU190
PUMP-TURBO,240L/S,208V,50/60HZ 621636 TPU240
PUMP-TURBO,240L/S,240V,50/60HZ 621638 TPU240
PUMP STA-DRAG/DIAPH,DRY,220V 635037 TSD022
ASSY-TSP OPTION,REM,DIGTEL MPC 635930 TSP
ASSY-TSP CTRL,PHI VER,REAR OUT 638680 TSP
TSP CONFIGURATION TSP TSP
PUMP STATION,TURBO TSU071D,MOD 644465 TSU071/MD4/DCU100
CLEAN/NEW FILAMENT/ALIGN TUNG-RBLT TUNG-RBLT
MONITOR-HITACHI,19",CM715U,CE 652795 TV CM715 HITACHI
MONITOR-HP,19",L1925 700212 TV L1925
MONITOR-HP,19",L1955 702062 TV L1955
MONITOR-HP 19" 751139 TV L1965
14 COLOR LCD,SONY LMD-1410 702869 TV LMD-1410
MONITOR-VIDEO 9" 647355 TV MD935
FIXED LOAD SPLY, AC/DC CONVTR TZP80 TZP80
HUB-USB 2.0,7 PORT, POWERED 752119 U222-007-R
VARIAN TRI SCROLL 300 649577 VAR PTS03001UNIV
PUMP-SCROLL,6M3/HR,VARIAN 650223 VAR SHO1001UNIV
PUMP-SCROLL,6M3/HR,VARIAN 702189 VAR SHO1101UNIV
PS-85W,5VDC,6A,+/-15VDC 639642 VFA423