Surface Analysis Products

For 40 years PHI surface analysis instruments have provided our customers with cutting edge technologies to solve their materials problems. Our complete product line enables detailed surface chemical characterization, nano-scale feature analysis, and thin film characterization. PHI can provide you with the surface analysis equipment that best meets your needs.

PHI 700xi - Auger Electron Spectroscopy (AES) Surface Analysis Equipment

PHI 700Xi Scanning Auger Nanoprobe

Technology: AES

High performance Scanning Auger Nanoprobe with less than 8 nm Auger spatial resolution is based on PHI’s unique CMA design that provides superior imaging of samples with topography, such as nanostructures, and high energy resolution spectroscopy. Proven charge neutralization technology extends the application of AES to many non-conductive materials.

PHI 700Xi Scanning Auger Nanoprobe (AES)
PHI Quantera II XPS Scanning Microprobe

PHI Quantera II Scanning XPS Microprobe

Technology: XPS

High performance scanning XPS microprobe with 7.5 µm spatial resolution provides high sensitivity large and micro-area spectroscopy, inorganic and organic sputter depth profiling, and the highest productivity XPS platform available.

PHI Quantera II Scanning XPS Microprobe (XPS)
PHI VersaProbe - X-Ray Photoelectron Spectroscopy (XPS) Surface Analysis Equipment

PHI VersaProbe II Scanning XPS Microprobe

Technology: XPS

PHI’s patented scanning XPS microprobe technology is now available on a versatile multi-technique surface analysis platform. Optional accessories include: UPS, dual anode x-ray source, AES, 10 or 20 kV C60+ion guns, 20 kV Ar2500+ gas cluster ion gun, and hot/cold sample stage.

PHI VersaProbe II Scanning XPS Microprobe (XPS)
PHI nanoTOF - Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) Equipment

PHI nanoTOF TOF-SIMS

Technology: TOF-SIMS

PHI’s patented TRIFT analyzer design provides superior performance for sub-micron elemental, chemical and molecular imaging and spectroscopy of surfaces and thin films via TOF-SIMS.

PHI nanoTOF (TOF-SIMS)
Used PHI Surface Analysis Equipment

Used PHI Equipment

Technology: Various

Used PHI surface analysis instruments are refurbished to restore original performance and sold with a standard one year factory warranty. Follow the link below to view a list of currently available used equipment.

Used PHI Equipment (Surface Analysis Equipment)