Surface Analysis Products

For 40 years PHI surface analysis instruments have provided our customers with cutting edge technologies to solve their materials problems. Our complete product line enables detailed surface chemical characterization, nano-scale feature analysis, and thin film characterization. PHI can provide you with the surface analysis equipment that best meets your needs.

PHI 700xi - Auger Electron Spectroscopy (AES) Surface Analysis Equipment

Technology: AES

High performance Scanning Auger Nanoprobe with less than 8 nm Auger spatial resolution is based on PHI’s unique CMA design. Proven charge neutralization technology extends the application of AES to many non-conductive materials.

PHI Quantera - X-Ray Photoelectron Spectroscopy (XPS) Equipment

Technology: XPS

High performance scanning XPS microprobe with less than 9 µm spatial resolution provides the highest micro-area XPS performance available, superior sputter depth profiling, and a high productivity sample handling platform.

PHI VersaProbe - X-Ray Photoelectron Spectroscopy (XPS) Surface Analysis Equipment

Technology: XPS

PHI’s patented scanning XPS microprobe technology is now available on a versatile multi-technique surface analysis platform.

PHI VersaProbe - XPS Microprobe Equipment Details

PHI nanoTOF - Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) Equipment

Technology: TOF-SIMS

PHI’s patented TRIFT analyzer design provides superior performance for sub-micron elemental, chemical and molecular characterization of surfaces and thin films via TOF-SIMS.

PHI Adept-1010 - Dynamic Secondary Ion Mass Spectrometry (D-SIMS) Equipment

Technology: D-SIMS

Automated trace element detection and semiconductor dopant profiling performance. A unique ultra high vacuum design enhances detection limits for atmospheric contaminants.

Technology: Various

Used PHI surface analysis instruments are refurbished to restore original performance and sold with a standard one year factory warranty. Follow the link below to view a list of currently available used equipment.