PHI 700Xi Scanning Auger Nanoprobe

Overview

The PHI 700Xi Scanning Auger Nanoprobe provides high performance Auger (AES) spectral analysis, Auger imaging, and sputter depth profiling of complex materials including: nanomaterials, catalysts, metals, and electronic devices.

The 700Xi’s field emission electron source provides a high brightness electron beam with a diameter of less than 6 nm for secondary electron imaging. The coaxial geometry of the 700Xi’s electron column and Cylindrical Mirror Analyzer (CMA) enables high Auger sensitivity over a broad range collection angles ensuring rapid and complete analysis routine flat samples as well as samples with complex shapes or high surface roughness.

A high performance sputter ion gun, motorized five axis sample stage, and high sensitivity analyzer provide a uniquely high performance thin film analysis (sputter depth profiling) capability. User selectable thin film analysis features including: multi-point thin film analysis, low voltage (100-500 V) sputtering, Compucentric Zalar Rotation™ and an array of advanced data reduction tools in PHI MultiPak, allow a user to extract as much information as possible from a sputter depth profile data set.

New features introduced with the 700Xi include: a high energy resolution spectroscopy capability, a scintillation detector for improved secondary electron imaging performance, and a manual user interface (knob box) for control of imaging functions.

For 40 years, PHI CMA based Auger instruments have been the first choice of surface analysts around the world. The PHI 700Xi provides a superior Auger instrument platform, proven reliability, and the performance.