Refurbished Equipment
Factory Certified Refurbished Instruments
These instruments have been fully refurbished at PHI and performance has been brought up to the original specifications. All instruments are backed with the same 1-year warranty as a new instrument. Prices include installation, warranty and training. Once the warranty expires, a wide range of service contracts are also available to meet your requirements. Below is a list of refurbished instruments currently available:
For further information regarding refurbished instruments, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353. PHI continually receives updates regarding used equipment for refurbishing, such as 670, 680, AES, and 5000 series XPS Systems. If you do not see what you need currently available on our website, please contact us at sales@phi.com.
Refurbished PHI SMART-II
The PHI SMART-II is designed to obtain definitive defect identification by Auger inspection. The tool is uniquely designed to perform comprehensive elemental characterization and secondary electron imaging inspection of particulate defects on blank, monitor and processed 200 mm wafers, 300 mm wafers, and reticle masks. Definitive elemental identification of defects is routinely accomplished with the system.
The system includes as standard a Schottky thermal field emission primary electron column, a full co-axial cylindrical mirror Auger analyzer, a high performance low voltage Argon sputter ion gun, a color zoom video camera, a four axis laser interferometer controlled wafer stage allowing full coverage of a 300 mm wafer, and a manual single wafer entry system. For more information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.
Refurbished PHI Quantum 2000
The Quantum 2000 Scanning XPS Microprobe is equipped with PHI's patented, scanning, microfocused x-ray source, dual beam charge neutralization, and a high performance floating column ion gun. This instrument provides high sensitivity large and small area spectroscopy with a minimum beam size of 10 µm or less. The floating column ion gun enables high performance thin film sputter depth profiling. For further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.
Refurbished PHI 670 Scanning Auger Nanoprobe
The PHI 670 Scanning Auger Nanoprobe uses PHI’s patented coaxial CMA analyzer and Schottky field emission electron gun technology. This instrument provides high sensitivity, high spatial resolution, Auger imaging and spectroscopy. The guaranteed ultimate spatial resolution of the instrument is 15 nm or less. For Further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.
