Used Equipment
Factory Certified Used Instruments
These instruments have been fully refurbished at PHI and performance has been brought up to the original specifications. All instruments are backed with the same 1-year warranty as a new instrument. Prices include installation, warranty and training. Once the warranty expires, a wide range of service contracts are also available to meet your requirements. Below is a list of used instruments currently available:
For further information regarding used instruments, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.
PHI continually receives updates regarding used equipment, such as 670, 680, AES, and 5000 series XPS Systems. If you do not see what you need currently available on our website, please contact us at sales@phi.com.
Used PHI
670 Scanning Auger Nanoprobe
PHI
670 Scanning Auger Nanoprobe
The PHI 670 Scanning Auger Nanoprobe uses PHI’s patented coaxial CMA analyzer and Schottky field emission electron gun technology. This instrument provides high sensitivity, high spatial resolution, Auger imaging and spectroscopy. The guaranteed ultimate spatial resolution of the instrument is 15 nm or less. For Further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.
Used PHI
SMART-II
PHI
SMART-II
The PHI
SMART-II is designed to obtain definitive defect identification by Auger inspection. The tool is uniquely designed to perform comprehensive elemental characterization and secondary electron imaging inspection of particulate defects on blank, monitor and processed 200mm and 300mm wafers. Definitive elemental identification of defects is routinely accomplished with the system.
The tool includes as standard a Schottky thermal field emission primary electron column, a full co-axial cylindrical mirror Auger analyzer, a high performance low voltage Argon sputter ion gun, a color zoom video camera, a four axis laser interferometer controlled wafer stage allowing full coverage of a 300mm wafer, an industry standard 300mm FOUP and FIM and a 200mm open cassette wafer loader. Wafer loading is robotically controlled in a Class1 mini-environment. For Further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.
Used PHI
690 Scanning Auger Nanoprobe
PHI
690 Scanning Auger Nanoprobe
The PHI
690 Scanning Auger Nanoprobe uses PHI’s patented coaxial CMA analyzer and Schottky field emission electron gun technology. This instrument provides high sensitivity, high spatial resolution, Auger imaging and spectroscopy. The guaranteed ultimate spatial resolution of the instrument is 11 nm or less. A high performance floating column ion gun facilitates high performance thin film analysis. For Further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.
Used PHI
SMART-200 Auger Defect Review Tool
PHI
SMART-200 Auger Defect Review Tool
This
SMART-200 Auger defect review tool is based on PHI’s patented coaxial analyzer and field emission electron gun technology. The sample handling apparatus can be used to manually introduce single 200 mm silicon wafers and navigate to defects. The ultimate spatial resolution of a
SMART-200is guaranteed to be 10 nm or less. For further information regarding this instrument, please contact the PHI sales person in your area or Walt Fix in sales support at 952-828-6353.
ON SALE NOW!:
ION GUN PACKAGE
Refurbished 04-303A, 11-065 Ion Gun Package
ALL COMPONENTS ARE COMPLETELY REBUILT, CALIBRATED, AND TESTED AND COME WITH A FULL 6-MONTH WARRANTY
04-303 Ion Gun
11-065 I
on Gun
Controller
Regulated Leak Valve
and Spare Ionizer
Items included in Ionizer Package:
• 04-303A ion gun with 5 KV beam voltage, 5ua total target current, and a beam diameter of 200 to 800 microns at 45.7 mm working distance (“A” version guns have two pumping ports)
• 11-065A ion gun controller with pressure reference output for regulated leak valve control
• RVG-050 Pfeiffer regulated leak valve control
• UDV-135 Pfeiffer regulated leak valve
• Spare Ionizer
• High voltage gun control cable
• Deflection cable
• RVG-050 & AC cables
On sale for $15,900.00 (includes packaging and shipping).
For further information or to purchase this item, please contact Irv Hosford in PHI Service at 952-828-6243 or via email at ihosford@phi.com.
ON SALE NOW!:
REFURBISHED IONIZERS
Refurbished Ionizers for 04-303 and 06-350 Type Ion Guns
ALL IONIZERS ARE COMPLETELY REFURBISHED AND COME WITH 500 HOURS OF FILAMENT LIFE WARRANTY
Refurbished Ionizer
Refurbished Ionizers:
• Fully refurbished.
• Look and perform like brand new.
• Come with the same standard warranty of new ionizers or 500 hours of filament life
• (excluding vacuum accidents).
• Return of a failed ionizer is not required for purchase
Quantities are limited. Please specify part number 627906 for 04-303 type ion guns, or part number 630957 for 06-350 or Quantum / Quantera ion guns.
On sale for $700.00 each (includes packaging and shipping) while supplies last.
For further information or to purchase these ionizers, please contact Irv Hosford in PHI Service at 952-828-6243 or via email at ihosford@phi.com.
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