MultiPak Version 9

Data Reduction Software for AES and XPS

PHI MultiPak has been long regarded as the most comprehensive data reduction and data interpretation software package in the industry.  It includes an array of powerful, easy-to-use software tools that include spectral peak identification, chemical state information, quantification, detection limit enhancement, and peak fitting for XPS and AES.

 The newly released MultiPak V9 has been enhanced by the addition of:

XPS spectral deconvolution for high speed/low exposure work (Figure 1)

Pass energy deconvolution graph
(Figure 1: New feature in MultiPak: Pass Energy Deconvolution)

polynomial background subtraction

principle component analysis smoothing for XPS maps

a 'save massaged files' feature

MultiPak comes standard with:

  • automatic peak identification
  • XPS chemical state databases
  • linear least squares fitting
  • non-linear least squares fitting
  • target factor analysis
  • ADXPS stratification
  • image scatter diagrams
  • retrospective chemical imaging
  • automated data reduction sequences
  •   batch mode processing

MultiPak Version 9 can be used on the instrument PC for real-time processing or on an off-line PCS for report generation and supports data file formats from:

  • SmartSoft
  • PC-Explorer
Color AES overlay image
(Figure 2: Color AES overlay: Si (green), SiOx (red), and W (blue) from a FIB cut of a defect)
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© 2024 Physical Electronics, Inc. (PHI) All Rights Reserved.
© 2024 Physical Electronics, Inc. (PHI) All Rights Reserved.